JPS51147190A - Method of manufacturing of integurated circuit for lsi - Google Patents

Method of manufacturing of integurated circuit for lsi

Info

Publication number
JPS51147190A
JPS51147190A JP50071573A JP7157375A JPS51147190A JP S51147190 A JPS51147190 A JP S51147190A JP 50071573 A JP50071573 A JP 50071573A JP 7157375 A JP7157375 A JP 7157375A JP S51147190 A JPS51147190 A JP S51147190A
Authority
JP
Japan
Prior art keywords
lsi
integurated
manufacturing
circuit
high yield
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50071573A
Other languages
English (en)
Other versions
JPS5943823B2 (ja
Inventor
Yoshitada Fujinami
Kenji Kani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP50071573A priority Critical patent/JPS5943823B2/ja
Publication of JPS51147190A publication Critical patent/JPS51147190A/ja
Publication of JPS5943823B2 publication Critical patent/JPS5943823B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Semiconductor Integrated Circuits (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)
JP50071573A 1975-06-12 1975-06-12 大規模半導体集積回路の製造方法 Expired JPS5943823B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50071573A JPS5943823B2 (ja) 1975-06-12 1975-06-12 大規模半導体集積回路の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50071573A JPS5943823B2 (ja) 1975-06-12 1975-06-12 大規模半導体集積回路の製造方法

Publications (2)

Publication Number Publication Date
JPS51147190A true JPS51147190A (en) 1976-12-17
JPS5943823B2 JPS5943823B2 (ja) 1984-10-24

Family

ID=13464570

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50071573A Expired JPS5943823B2 (ja) 1975-06-12 1975-06-12 大規模半導体集積回路の製造方法

Country Status (1)

Country Link
JP (1) JPS5943823B2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07106531A (ja) * 1993-10-06 1995-04-21 Nec Corp ゲートアレー構成半導体装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63243639A (ja) * 1987-03-30 1988-10-11 Toyotomi Kogyo Co Ltd 温水循環装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07106531A (ja) * 1993-10-06 1995-04-21 Nec Corp ゲートアレー構成半導体装置

Also Published As

Publication number Publication date
JPS5943823B2 (ja) 1984-10-24

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