JPS524780A - Manufacturing method of semiconductor equipment - Google Patents

Manufacturing method of semiconductor equipment

Info

Publication number
JPS524780A
JPS524780A JP8122275A JP8122275A JPS524780A JP S524780 A JPS524780 A JP S524780A JP 8122275 A JP8122275 A JP 8122275A JP 8122275 A JP8122275 A JP 8122275A JP S524780 A JPS524780 A JP S524780A
Authority
JP
Japan
Prior art keywords
manufacturing
semiconductor equipment
making
circuit
wiring short
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8122275A
Other languages
Japanese (ja)
Inventor
Teiichi Endo
Toshio Komuro
Noboru Ando
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP8122275A priority Critical patent/JPS524780A/en
Publication of JPS524780A publication Critical patent/JPS524780A/en
Pending legal-status Critical Current

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  • Dicing (AREA)

Abstract

PURPOSE: To eliminate wiring short-circuit by making a groove beforehand in the scribe zone.
COPYRIGHT: (C)1977,JPO&Japio
JP8122275A 1975-07-01 1975-07-01 Manufacturing method of semiconductor equipment Pending JPS524780A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8122275A JPS524780A (en) 1975-07-01 1975-07-01 Manufacturing method of semiconductor equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8122275A JPS524780A (en) 1975-07-01 1975-07-01 Manufacturing method of semiconductor equipment

Publications (1)

Publication Number Publication Date
JPS524780A true JPS524780A (en) 1977-01-14

Family

ID=13740442

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8122275A Pending JPS524780A (en) 1975-07-01 1975-07-01 Manufacturing method of semiconductor equipment

Country Status (1)

Country Link
JP (1) JPS524780A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5462539A (en) * 1977-10-27 1979-05-19 Furukawa Electric Co Ltd:The Two-dimensional heater for high temperature
JPS5591094U (en) * 1978-12-18 1980-06-24
JPS5593990U (en) * 1978-12-22 1980-06-28

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51113459A (en) * 1975-03-29 1976-10-06 Nec Home Electronics Ltd A method for manufacturing semiconductor devices

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51113459A (en) * 1975-03-29 1976-10-06 Nec Home Electronics Ltd A method for manufacturing semiconductor devices

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5462539A (en) * 1977-10-27 1979-05-19 Furukawa Electric Co Ltd:The Two-dimensional heater for high temperature
JPS5591094U (en) * 1978-12-18 1980-06-24
JPS5593990U (en) * 1978-12-22 1980-06-28

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