JPS51147208A - Deflector of charged particle - Google Patents

Deflector of charged particle

Info

Publication number
JPS51147208A
JPS51147208A JP50071497A JP7149775A JPS51147208A JP S51147208 A JPS51147208 A JP S51147208A JP 50071497 A JP50071497 A JP 50071497A JP 7149775 A JP7149775 A JP 7149775A JP S51147208 A JPS51147208 A JP S51147208A
Authority
JP
Japan
Prior art keywords
deflector
charged particle
high velocity
make high
velocity deflection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50071497A
Other languages
Japanese (ja)
Inventor
Genya Matsuoka
Norio Saito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50071497A priority Critical patent/JPS51147208A/en
Publication of JPS51147208A publication Critical patent/JPS51147208A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To make high velocity deflection available.
JP50071497A 1975-06-13 1975-06-13 Deflector of charged particle Pending JPS51147208A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50071497A JPS51147208A (en) 1975-06-13 1975-06-13 Deflector of charged particle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50071497A JPS51147208A (en) 1975-06-13 1975-06-13 Deflector of charged particle

Publications (1)

Publication Number Publication Date
JPS51147208A true JPS51147208A (en) 1976-12-17

Family

ID=13462352

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50071497A Pending JPS51147208A (en) 1975-06-13 1975-06-13 Deflector of charged particle

Country Status (1)

Country Link
JP (1) JPS51147208A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60192358U (en) * 1984-05-31 1985-12-20 株式会社島津製作所 Charged particle beam device
JPS6433834A (en) * 1987-07-28 1989-02-03 Mitsubishi Electric Corp Electron beam device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60192358U (en) * 1984-05-31 1985-12-20 株式会社島津製作所 Charged particle beam device
JPS6433834A (en) * 1987-07-28 1989-02-03 Mitsubishi Electric Corp Electron beam device

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