JPS51147246A - Beam axis adjuster - Google Patents

Beam axis adjuster

Info

Publication number
JPS51147246A
JPS51147246A JP50071498A JP7149875A JPS51147246A JP S51147246 A JPS51147246 A JP S51147246A JP 50071498 A JP50071498 A JP 50071498A JP 7149875 A JP7149875 A JP 7149875A JP S51147246 A JPS51147246 A JP S51147246A
Authority
JP
Japan
Prior art keywords
beam axis
axis adjuster
adjuster
oprimum
keep
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50071498A
Other languages
English (en)
Inventor
Genya Matsuoka
Isamu Oda
Norio Saito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50071498A priority Critical patent/JPS51147246A/ja
Publication of JPS51147246A publication Critical patent/JPS51147246A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
JP50071498A 1975-06-13 1975-06-13 Beam axis adjuster Pending JPS51147246A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50071498A JPS51147246A (en) 1975-06-13 1975-06-13 Beam axis adjuster

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50071498A JPS51147246A (en) 1975-06-13 1975-06-13 Beam axis adjuster

Publications (1)

Publication Number Publication Date
JPS51147246A true JPS51147246A (en) 1976-12-17

Family

ID=13462381

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50071498A Pending JPS51147246A (en) 1975-06-13 1975-06-13 Beam axis adjuster

Country Status (1)

Country Link
JP (1) JPS51147246A (ja)

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