JPS51147324A - Solvent for electronic wire resist - Google Patents

Solvent for electronic wire resist

Info

Publication number
JPS51147324A
JPS51147324A JP7160275A JP7160275A JPS51147324A JP S51147324 A JPS51147324 A JP S51147324A JP 7160275 A JP7160275 A JP 7160275A JP 7160275 A JP7160275 A JP 7160275A JP S51147324 A JPS51147324 A JP S51147324A
Authority
JP
Japan
Prior art keywords
solvent
electronic wire
wire resist
resist
electronic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7160275A
Other languages
Japanese (ja)
Inventor
Kenzo Yanagida
Toshihiro Ishizuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP7160275A priority Critical patent/JPS51147324A/en
Publication of JPS51147324A publication Critical patent/JPS51147324A/en
Pending legal-status Critical Current

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)

Abstract

PURPOSE: To get the resist film of uniform and free from irregular film thickness.
COPYRIGHT: (C)1976,JPO&Japio
JP7160275A 1975-06-13 1975-06-13 Solvent for electronic wire resist Pending JPS51147324A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7160275A JPS51147324A (en) 1975-06-13 1975-06-13 Solvent for electronic wire resist

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7160275A JPS51147324A (en) 1975-06-13 1975-06-13 Solvent for electronic wire resist

Publications (1)

Publication Number Publication Date
JPS51147324A true JPS51147324A (en) 1976-12-17

Family

ID=13465359

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7160275A Pending JPS51147324A (en) 1975-06-13 1975-06-13 Solvent for electronic wire resist

Country Status (1)

Country Link
JP (1) JPS51147324A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53123929A (en) * 1977-04-05 1978-10-28 Tokyo Ouka Kougiyou Kk Developing liquid for use in radiant ray positive type resist
JPH0197950A (en) * 1986-09-01 1989-04-17 Sanyo Electric Co Ltd Polymeric radiation sensitive material

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4915372A (en) * 1972-03-24 1974-02-09

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4915372A (en) * 1972-03-24 1974-02-09

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53123929A (en) * 1977-04-05 1978-10-28 Tokyo Ouka Kougiyou Kk Developing liquid for use in radiant ray positive type resist
JPH0197950A (en) * 1986-09-01 1989-04-17 Sanyo Electric Co Ltd Polymeric radiation sensitive material

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