JPS51147377A - Beam diameter measurement device of a charged particle beam - Google Patents

Beam diameter measurement device of a charged particle beam

Info

Publication number
JPS51147377A
JPS51147377A JP50070833A JP7083375A JPS51147377A JP S51147377 A JPS51147377 A JP S51147377A JP 50070833 A JP50070833 A JP 50070833A JP 7083375 A JP7083375 A JP 7083375A JP S51147377 A JPS51147377 A JP S51147377A
Authority
JP
Japan
Prior art keywords
charged particle
measurement device
diameter measurement
particle beam
beam diameter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50070833A
Other languages
Japanese (ja)
Other versions
JPS5814618B2 (en
Inventor
Norio Saito
Tadasuke Munakata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50070833A priority Critical patent/JPS5814618B2/en
Publication of JPS51147377A publication Critical patent/JPS51147377A/en
Publication of JPS5814618B2 publication Critical patent/JPS5814618B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Measurement Of Radiation (AREA)

Abstract

PURPOSE: This simple structure device ensures the high accuracy measurement of the beam diameter of about I μm charged particle beam.
COPYRIGHT: (C)1976,JPO&Japio
JP50070833A 1975-06-13 1975-06-13 Kadenriyuushibimunobeamkei-sokuteisouchi Expired JPS5814618B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50070833A JPS5814618B2 (en) 1975-06-13 1975-06-13 Kadenriyuushibimunobeamkei-sokuteisouchi

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50070833A JPS5814618B2 (en) 1975-06-13 1975-06-13 Kadenriyuushibimunobeamkei-sokuteisouchi

Publications (2)

Publication Number Publication Date
JPS51147377A true JPS51147377A (en) 1976-12-17
JPS5814618B2 JPS5814618B2 (en) 1983-03-19

Family

ID=13442957

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50070833A Expired JPS5814618B2 (en) 1975-06-13 1975-06-13 Kadenriyuushibimunobeamkei-sokuteisouchi

Country Status (1)

Country Link
JP (1) JPS5814618B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5492060A (en) * 1977-12-29 1979-07-20 Jeol Ltd Electron beam exposure device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5492060A (en) * 1977-12-29 1979-07-20 Jeol Ltd Electron beam exposure device

Also Published As

Publication number Publication date
JPS5814618B2 (en) 1983-03-19

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