JPS51148374A - Exposure device by electron beam - Google Patents

Exposure device by electron beam

Info

Publication number
JPS51148374A
JPS51148374A JP50072597A JP7259775A JPS51148374A JP S51148374 A JPS51148374 A JP S51148374A JP 50072597 A JP50072597 A JP 50072597A JP 7259775 A JP7259775 A JP 7259775A JP S51148374 A JPS51148374 A JP S51148374A
Authority
JP
Japan
Prior art keywords
electron beam
exposure device
widthes
focus
maintain
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50072597A
Other languages
English (en)
Inventor
Kimio Yanagida
Kenichi Kawashima
Yasutaka Ban
Takaharu Shima
Yushi Inagaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP50072597A priority Critical patent/JPS51148374A/ja
Publication of JPS51148374A publication Critical patent/JPS51148374A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP50072597A 1975-06-14 1975-06-14 Exposure device by electron beam Pending JPS51148374A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50072597A JPS51148374A (en) 1975-06-14 1975-06-14 Exposure device by electron beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50072597A JPS51148374A (en) 1975-06-14 1975-06-14 Exposure device by electron beam

Publications (1)

Publication Number Publication Date
JPS51148374A true JPS51148374A (en) 1976-12-20

Family

ID=13493958

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50072597A Pending JPS51148374A (en) 1975-06-14 1975-06-14 Exposure device by electron beam

Country Status (1)

Country Link
JP (1) JPS51148374A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5372090A (en) * 1976-12-09 1978-06-27 Nippon Paint Co Ltd Thermosetting resin, its preparation and coating composttion

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5372090A (en) * 1976-12-09 1978-06-27 Nippon Paint Co Ltd Thermosetting resin, its preparation and coating composttion

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