JPS51148378A - Manufacturing method of insulation gate type electric field effect tra nsistor - Google Patents

Manufacturing method of insulation gate type electric field effect tra nsistor

Info

Publication number
JPS51148378A
JPS51148378A JP7257975A JP7257975A JPS51148378A JP S51148378 A JPS51148378 A JP S51148378A JP 7257975 A JP7257975 A JP 7257975A JP 7257975 A JP7257975 A JP 7257975A JP S51148378 A JPS51148378 A JP S51148378A
Authority
JP
Japan
Prior art keywords
manufacturing
electric field
field effect
type electric
gate type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7257975A
Other languages
English (en)
Other versions
JPS596073B2 (ja
Inventor
Kazunari Shirai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP7257975A priority Critical patent/JPS596073B2/ja
Publication of JPS51148378A publication Critical patent/JPS51148378A/ja
Publication of JPS596073B2 publication Critical patent/JPS596073B2/ja
Expired legal-status Critical Current

Links

JP7257975A 1975-06-14 1975-06-14 ゼツエンゲ−トガタデンカイコウカトランジスタノ セイゾウホウホウ Expired JPS596073B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7257975A JPS596073B2 (ja) 1975-06-14 1975-06-14 ゼツエンゲ−トガタデンカイコウカトランジスタノ セイゾウホウホウ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7257975A JPS596073B2 (ja) 1975-06-14 1975-06-14 ゼツエンゲ−トガタデンカイコウカトランジスタノ セイゾウホウホウ

Publications (2)

Publication Number Publication Date
JPS51148378A true JPS51148378A (en) 1976-12-20
JPS596073B2 JPS596073B2 (ja) 1984-02-08

Family

ID=13493421

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7257975A Expired JPS596073B2 (ja) 1975-06-14 1975-06-14 ゼツエンゲ−トガタデンカイコウカトランジスタノ セイゾウホウホウ

Country Status (1)

Country Link
JP (1) JPS596073B2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54122092A (en) * 1978-03-16 1979-09-21 Oki Electric Ind Co Ltd Manufacture of semiconductor integrated circuit
JPS58127381A (ja) * 1982-01-26 1983-07-29 Seiko Epson Corp 半導体装置の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54122092A (en) * 1978-03-16 1979-09-21 Oki Electric Ind Co Ltd Manufacture of semiconductor integrated circuit
JPS58127381A (ja) * 1982-01-26 1983-07-29 Seiko Epson Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS596073B2 (ja) 1984-02-08

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