JPS51148426A - Electronic-resist - Google Patents

Electronic-resist

Info

Publication number
JPS51148426A
JPS51148426A JP7257475A JP7257475A JPS51148426A JP S51148426 A JPS51148426 A JP S51148426A JP 7257475 A JP7257475 A JP 7257475A JP 7257475 A JP7257475 A JP 7257475A JP S51148426 A JPS51148426 A JP S51148426A
Authority
JP
Japan
Prior art keywords
resist
electronic
alkalines
specifying
chemicals
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7257475A
Other languages
Japanese (ja)
Inventor
Yasuhiro Yoneda
Toshisuke Kitakoji
Masatoshi Fujimori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP7257475A priority Critical patent/JPS51148426A/en
Publication of JPS51148426A publication Critical patent/JPS51148426A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: In order to obtain an electronic-resist with uniform thickness, and stable for the environmental variation as well as chemicals such as acids, alkalines and so on, through specifying amorphous titanium oxide as organic titanium compounds.
COPYRIGHT: (C)1976,JPO&Japio
JP7257475A 1975-06-14 1975-06-14 Electronic-resist Pending JPS51148426A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7257475A JPS51148426A (en) 1975-06-14 1975-06-14 Electronic-resist

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7257475A JPS51148426A (en) 1975-06-14 1975-06-14 Electronic-resist

Publications (1)

Publication Number Publication Date
JPS51148426A true JPS51148426A (en) 1976-12-20

Family

ID=13493275

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7257475A Pending JPS51148426A (en) 1975-06-14 1975-06-14 Electronic-resist

Country Status (1)

Country Link
JP (1) JPS51148426A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8273413B2 (en) 2009-07-02 2012-09-25 International Business Machines Corporation Methods of forming metal oxide nanostructures, and nanostructures thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8273413B2 (en) 2009-07-02 2012-09-25 International Business Machines Corporation Methods of forming metal oxide nanostructures, and nanostructures thereof
US8771632B2 (en) 2009-07-02 2014-07-08 International Business Machines Corporation Methods of forming metal oxide nanostructures, and nanostructures thereof

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