JPS51148451A - Basic position-error detection system - Google Patents

Basic position-error detection system

Info

Publication number
JPS51148451A
JPS51148451A JP50072295A JP7229575A JPS51148451A JP S51148451 A JPS51148451 A JP S51148451A JP 50072295 A JP50072295 A JP 50072295A JP 7229575 A JP7229575 A JP 7229575A JP S51148451 A JPS51148451 A JP S51148451A
Authority
JP
Japan
Prior art keywords
basic position
detection system
error detection
patterning
spot
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50072295A
Other languages
Japanese (ja)
Inventor
Junichi Ishii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP50072295A priority Critical patent/JPS51148451A/en
Publication of JPS51148451A publication Critical patent/JPS51148451A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Optical Transform (AREA)

Abstract

PURPOSE:A system with which high speed and accurate detection of basic position error becomes possible, through scanning with an electron beam with a spot-exposing device in which a memory device is installed, when patterning a integrated circuit.
JP50072295A 1975-06-14 1975-06-14 Basic position-error detection system Pending JPS51148451A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50072295A JPS51148451A (en) 1975-06-14 1975-06-14 Basic position-error detection system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50072295A JPS51148451A (en) 1975-06-14 1975-06-14 Basic position-error detection system

Publications (1)

Publication Number Publication Date
JPS51148451A true JPS51148451A (en) 1976-12-20

Family

ID=13485119

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50072295A Pending JPS51148451A (en) 1975-06-14 1975-06-14 Basic position-error detection system

Country Status (1)

Country Link
JP (1) JPS51148451A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5498268A (en) * 1978-01-16 1979-08-03 Ibm Method of inspecting position
JPS5821111A (en) * 1981-07-29 1983-02-07 Nippon Kogaku Kk <Nikon> Positioning device for pattern detection
JPS59163506A (en) * 1983-03-09 1984-09-14 Hitachi Ltd Electronic beam measuring device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5498268A (en) * 1978-01-16 1979-08-03 Ibm Method of inspecting position
JPS5821111A (en) * 1981-07-29 1983-02-07 Nippon Kogaku Kk <Nikon> Positioning device for pattern detection
JPS59163506A (en) * 1983-03-09 1984-09-14 Hitachi Ltd Electronic beam measuring device

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