JPS51148681A - A substrate member moving jig for film formation - Google Patents

A substrate member moving jig for film formation

Info

Publication number
JPS51148681A
JPS51148681A JP7254475A JP7254475A JPS51148681A JP S51148681 A JPS51148681 A JP S51148681A JP 7254475 A JP7254475 A JP 7254475A JP 7254475 A JP7254475 A JP 7254475A JP S51148681 A JPS51148681 A JP S51148681A
Authority
JP
Japan
Prior art keywords
substrate member
film formation
member moving
moving jig
jig
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7254475A
Other languages
Japanese (ja)
Inventor
Yasutomo Sasanuma
Keizo Shinano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Citizen Watch Co Ltd
Original Assignee
Citizen Watch Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Citizen Watch Co Ltd filed Critical Citizen Watch Co Ltd
Priority to JP7254475A priority Critical patent/JPS51148681A/en
Publication of JPS51148681A publication Critical patent/JPS51148681A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:In forming a film by evaporation, a jig formable of a uniform film even on the substrate member of an intricate shape.
JP7254475A 1975-06-14 1975-06-14 A substrate member moving jig for film formation Pending JPS51148681A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7254475A JPS51148681A (en) 1975-06-14 1975-06-14 A substrate member moving jig for film formation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7254475A JPS51148681A (en) 1975-06-14 1975-06-14 A substrate member moving jig for film formation

Publications (1)

Publication Number Publication Date
JPS51148681A true JPS51148681A (en) 1976-12-21

Family

ID=13492394

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7254475A Pending JPS51148681A (en) 1975-06-14 1975-06-14 A substrate member moving jig for film formation

Country Status (1)

Country Link
JP (1) JPS51148681A (en)

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