JPS5114931Y2 - - Google Patents

Info

Publication number
JPS5114931Y2
JPS5114931Y2 JP1971018971U JP1897171U JPS5114931Y2 JP S5114931 Y2 JPS5114931 Y2 JP S5114931Y2 JP 1971018971 U JP1971018971 U JP 1971018971U JP 1897171 U JP1897171 U JP 1897171U JP S5114931 Y2 JPS5114931 Y2 JP S5114931Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1971018971U
Other languages
Japanese (ja)
Other versions
JPS4720843U (
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1971018971U priority Critical patent/JPS5114931Y2/ja
Publication of JPS4720843U publication Critical patent/JPS4720843U/ja
Application granted granted Critical
Publication of JPS5114931Y2 publication Critical patent/JPS5114931Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP1971018971U 1971-03-18 1971-03-18 Expired JPS5114931Y2 ( )

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1971018971U JPS5114931Y2 ( ) 1971-03-18 1971-03-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1971018971U JPS5114931Y2 ( ) 1971-03-18 1971-03-18

Publications (2)

Publication Number Publication Date
JPS4720843U JPS4720843U ( ) 1972-11-09
JPS5114931Y2 true JPS5114931Y2 ( ) 1976-04-20

Family

ID=27871316

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1971018971U Expired JPS5114931Y2 ( ) 1971-03-18 1971-03-18

Country Status (1)

Country Link
JP (1) JPS5114931Y2 ( )

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5739085Y2 ( ) * 1977-10-05 1982-08-27
JPS5636179U ( ) * 1979-08-28 1981-04-07
JPS5814839A (ja) * 1981-07-20 1983-01-27 Sumitomo Metal Mining Co Ltd 投影露光装置
JPS6173142U ( ) * 1984-10-18 1986-05-17
JP5208618B2 (ja) * 2008-08-19 2013-06-12 ショーダテクトロン株式会社 回路基板の端面被覆装置

Also Published As

Publication number Publication date
JPS4720843U ( ) 1972-11-09

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