JPS51150873A - Cleaning head supporting apparatus - Google Patents

Cleaning head supporting apparatus

Info

Publication number
JPS51150873A
JPS51150873A JP7495275A JP7495275A JPS51150873A JP S51150873 A JPS51150873 A JP S51150873A JP 7495275 A JP7495275 A JP 7495275A JP 7495275 A JP7495275 A JP 7495275A JP S51150873 A JPS51150873 A JP S51150873A
Authority
JP
Japan
Prior art keywords
cleaning head
supporting apparatus
head supporting
cleaned
posture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7495275A
Other languages
Japanese (ja)
Other versions
JPS5440864B2 (en
Inventor
Shosuke Oie
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP7495275A priority Critical patent/JPS51150873A/en
Publication of JPS51150873A publication Critical patent/JPS51150873A/en
Publication of JPS5440864B2 publication Critical patent/JPS5440864B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)

Abstract

PURPOSE: To clean the surface to be cleaned safely and completely from the upper end and the lower end of the surface by changing the posture of a cleaning head at the beginning and at the end of the surface to be cleaned.
COPYRIGHT: (C)1976,JPO&Japio
JP7495275A 1975-06-18 1975-06-18 Cleaning head supporting apparatus Granted JPS51150873A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7495275A JPS51150873A (en) 1975-06-18 1975-06-18 Cleaning head supporting apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7495275A JPS51150873A (en) 1975-06-18 1975-06-18 Cleaning head supporting apparatus

Publications (2)

Publication Number Publication Date
JPS51150873A true JPS51150873A (en) 1976-12-24
JPS5440864B2 JPS5440864B2 (en) 1979-12-05

Family

ID=13562159

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7495275A Granted JPS51150873A (en) 1975-06-18 1975-06-18 Cleaning head supporting apparatus

Country Status (1)

Country Link
JP (1) JPS51150873A (en)

Also Published As

Publication number Publication date
JPS5440864B2 (en) 1979-12-05

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