JPS5116878A - Hoto masukuno seizohoho - Google Patents

Hoto masukuno seizohoho

Info

Publication number
JPS5116878A
JPS5116878A JP8841474A JP8841474A JPS5116878A JP S5116878 A JPS5116878 A JP S5116878A JP 8841474 A JP8841474 A JP 8841474A JP 8841474 A JP8841474 A JP 8841474A JP S5116878 A JPS5116878 A JP S5116878A
Authority
JP
Japan
Prior art keywords
masukuno
hoto
seizohoho
masukuno seizohoho
hoto masukuno
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8841474A
Other languages
Japanese (ja)
Other versions
JPS5420317B2 (en
Inventor
Takao Furukawa
Eiji Nishikata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP8841474A priority Critical patent/JPS5116878A/en
Publication of JPS5116878A publication Critical patent/JPS5116878A/en
Publication of JPS5420317B2 publication Critical patent/JPS5420317B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP8841474A 1974-08-01 1974-08-01 Hoto masukuno seizohoho Granted JPS5116878A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8841474A JPS5116878A (en) 1974-08-01 1974-08-01 Hoto masukuno seizohoho

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8841474A JPS5116878A (en) 1974-08-01 1974-08-01 Hoto masukuno seizohoho

Publications (2)

Publication Number Publication Date
JPS5116878A true JPS5116878A (en) 1976-02-10
JPS5420317B2 JPS5420317B2 (en) 1979-07-21

Family

ID=13942124

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8841474A Granted JPS5116878A (en) 1974-08-01 1974-08-01 Hoto masukuno seizohoho

Country Status (1)

Country Link
JP (1) JPS5116878A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5552143U (en) * 1978-10-04 1980-04-07
JPS5568456U (en) * 1978-11-02 1980-05-12
JPS63134A (en) * 1986-06-19 1988-01-05 Sanyo Electric Co Ltd Method of testing reticle
JPS6380546U (en) * 1986-11-17 1988-05-27

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5552143U (en) * 1978-10-04 1980-04-07
JPS5568456U (en) * 1978-11-02 1980-05-12
JPS63134A (en) * 1986-06-19 1988-01-05 Sanyo Electric Co Ltd Method of testing reticle
JPS6380546U (en) * 1986-11-17 1988-05-27

Also Published As

Publication number Publication date
JPS5420317B2 (en) 1979-07-21

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