JPS5116881A - Eaa pinsetsuto - Google Patents

Eaa pinsetsuto

Info

Publication number
JPS5116881A
JPS5116881A JP8806874A JP8806874A JPS5116881A JP S5116881 A JPS5116881 A JP S5116881A JP 8806874 A JP8806874 A JP 8806874A JP 8806874 A JP8806874 A JP 8806874A JP S5116881 A JPS5116881 A JP S5116881A
Authority
JP
Japan
Prior art keywords
pinsetsuto
eaa
eaa pinsetsuto
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8806874A
Other languages
English (en)
Inventor
Masaru Tsukahara
Takashi Akazawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8806874A priority Critical patent/JPS5116881A/ja
Publication of JPS5116881A publication Critical patent/JPS5116881A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
  • Feeding Of Workpieces (AREA)
JP8806874A 1974-08-02 1974-08-02 Eaa pinsetsuto Pending JPS5116881A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8806874A JPS5116881A (en) 1974-08-02 1974-08-02 Eaa pinsetsuto

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8806874A JPS5116881A (en) 1974-08-02 1974-08-02 Eaa pinsetsuto

Publications (1)

Publication Number Publication Date
JPS5116881A true JPS5116881A (en) 1976-02-10

Family

ID=13932524

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8806874A Pending JPS5116881A (en) 1974-08-02 1974-08-02 Eaa pinsetsuto

Country Status (1)

Country Link
JP (1) JPS5116881A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62127767U (ja) * 1986-02-03 1987-08-13
JPH03505946A (ja) * 1988-06-17 1991-12-19 アドヴァンスド、セミコンダクター・マテリアルズ・アメリカ・インコーポレーテッド ベルヌーイのピックアップを備えるウエーハ取り扱いシステム
JP2016225391A (ja) * 2015-05-28 2016-12-28 昭和電工株式会社 基板保持部材、変換用基板保持部材、基板保持装置、基板処理装置、レジスト塗布方法、及び半導体素子の製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62127767U (ja) * 1986-02-03 1987-08-13
JPH03505946A (ja) * 1988-06-17 1991-12-19 アドヴァンスド、セミコンダクター・マテリアルズ・アメリカ・インコーポレーテッド ベルヌーイのピックアップを備えるウエーハ取り扱いシステム
JP2016225391A (ja) * 2015-05-28 2016-12-28 昭和電工株式会社 基板保持部材、変換用基板保持部材、基板保持装置、基板処理装置、レジスト塗布方法、及び半導体素子の製造方法

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