JPS5120192A - Ratsupubanniokeru shuseiringu - Google Patents

Ratsupubanniokeru shuseiringu

Info

Publication number
JPS5120192A
JPS5120192A JP49092089A JP9208974A JPS5120192A JP S5120192 A JPS5120192 A JP S5120192A JP 49092089 A JP49092089 A JP 49092089A JP 9208974 A JP9208974 A JP 9208974A JP S5120192 A JPS5120192 A JP S5120192A
Authority
JP
Japan
Prior art keywords
shuseiringu
ratsupubanniokeru
ratsupubanniokeru shuseiringu
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP49092089A
Other languages
English (en)
Inventor
Terumi Murai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP49092089A priority Critical patent/JPS5120192A/ja
Publication of JPS5120192A publication Critical patent/JPS5120192A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
JP49092089A 1974-08-12 1974-08-12 Ratsupubanniokeru shuseiringu Pending JPS5120192A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP49092089A JPS5120192A (en) 1974-08-12 1974-08-12 Ratsupubanniokeru shuseiringu

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49092089A JPS5120192A (en) 1974-08-12 1974-08-12 Ratsupubanniokeru shuseiringu

Publications (1)

Publication Number Publication Date
JPS5120192A true JPS5120192A (en) 1976-02-18

Family

ID=14044704

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49092089A Pending JPS5120192A (en) 1974-08-12 1974-08-12 Ratsupubanniokeru shuseiringu

Country Status (1)

Country Link
JP (1) JPS5120192A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5815669A (ja) * 1981-07-22 1983-01-29 Taiho Kogyo Co Ltd ホ−ニング加工装置
JPH0487768A (ja) * 1990-07-27 1992-03-19 Noritake Co Ltd 硬脆性材料ラッピング方法および装置
JPH07237120A (ja) * 1994-02-22 1995-09-12 Nec Corp ウェーハ研磨装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS485956U (ja) * 1971-05-31 1973-01-23

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS485956U (ja) * 1971-05-31 1973-01-23

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5815669A (ja) * 1981-07-22 1983-01-29 Taiho Kogyo Co Ltd ホ−ニング加工装置
JPH0487768A (ja) * 1990-07-27 1992-03-19 Noritake Co Ltd 硬脆性材料ラッピング方法および装置
JPH07237120A (ja) * 1994-02-22 1995-09-12 Nec Corp ウェーハ研磨装置

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