JPS512263A - - Google Patents

Info

Publication number
JPS512263A
JPS512263A JP7230074A JP7230074A JPS512263A JP S512263 A JPS512263 A JP S512263A JP 7230074 A JP7230074 A JP 7230074A JP 7230074 A JP7230074 A JP 7230074A JP S512263 A JPS512263 A JP S512263A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7230074A
Other languages
Japanese (ja)
Inventor
Yukio Takanashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP7230074A priority Critical patent/JPS512263A/ja
Publication of JPS512263A publication Critical patent/JPS512263A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Manufacturing Of Printed Wiring (AREA)
JP7230074A 1974-06-26 1974-06-26 Pending JPS512263A (da)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7230074A JPS512263A (da) 1974-06-26 1974-06-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7230074A JPS512263A (da) 1974-06-26 1974-06-26

Publications (1)

Publication Number Publication Date
JPS512263A true JPS512263A (da) 1976-01-09

Family

ID=13485267

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7230074A Pending JPS512263A (da) 1974-06-26 1974-06-26

Country Status (1)

Country Link
JP (1) JPS512263A (da)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5864597A (ja) * 1981-10-14 1983-04-16 株式会社ニコン 補正装置を具備したエンコーダ
JPS6446708U (da) * 1987-09-17 1989-03-22

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4527822Y1 (da) * 1966-04-27 1970-10-27
JPS4527882Y1 (da) * 1968-05-28 1970-10-27

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4527822Y1 (da) * 1966-04-27 1970-10-27
JPS4527882Y1 (da) * 1968-05-28 1970-10-27

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5864597A (ja) * 1981-10-14 1983-04-16 株式会社ニコン 補正装置を具備したエンコーダ
JPS6446708U (da) * 1987-09-17 1989-03-22

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