JPS5125986A - Handotaishusekikairosochi no seizohoho - Google Patents

Handotaishusekikairosochi no seizohoho

Info

Publication number
JPS5125986A
JPS5125986A JP9789574A JP9789574A JPS5125986A JP S5125986 A JPS5125986 A JP S5125986A JP 9789574 A JP9789574 A JP 9789574A JP 9789574 A JP9789574 A JP 9789574A JP S5125986 A JPS5125986 A JP S5125986A
Authority
JP
Japan
Prior art keywords
handotaishusekikairosochi
seizohoho
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9789574A
Other languages
English (en)
Inventor
Tadao Kachi
Osamu Kasahara
Osamu Yumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9789574A priority Critical patent/JPS5125986A/ja
Publication of JPS5125986A publication Critical patent/JPS5125986A/ja
Pending legal-status Critical Current

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  • Element Separation (AREA)
JP9789574A 1974-08-28 1974-08-28 Handotaishusekikairosochi no seizohoho Pending JPS5125986A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9789574A JPS5125986A (ja) 1974-08-28 1974-08-28 Handotaishusekikairosochi no seizohoho

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9789574A JPS5125986A (ja) 1974-08-28 1974-08-28 Handotaishusekikairosochi no seizohoho

Publications (1)

Publication Number Publication Date
JPS5125986A true JPS5125986A (ja) 1976-03-03

Family

ID=14204470

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9789574A Pending JPS5125986A (ja) 1974-08-28 1974-08-28 Handotaishusekikairosochi no seizohoho

Country Status (1)

Country Link
JP (1) JPS5125986A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5176991A (ja) * 1974-12-27 1976-07-03 Fujitsu Ltd Handotaisochinoseizohoho
JPS5443839A (en) * 1977-09-13 1979-04-06 Ibm Method of forming silicon oxide territory
JPS55148466A (en) * 1979-05-10 1980-11-19 Nec Corp Cmos semiconductor device and its manufacture

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS508316A (ja) * 1973-05-25 1975-01-28

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS508316A (ja) * 1973-05-25 1975-01-28

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5176991A (ja) * 1974-12-27 1976-07-03 Fujitsu Ltd Handotaisochinoseizohoho
JPS5443839A (en) * 1977-09-13 1979-04-06 Ibm Method of forming silicon oxide territory
JPS55148466A (en) * 1979-05-10 1980-11-19 Nec Corp Cmos semiconductor device and its manufacture

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