JPS512681A - Shirikonno epitakisharusooseichosaseruhoho - Google Patents

Shirikonno epitakisharusooseichosaseruhoho

Info

Publication number
JPS512681A
JPS512681A JP50063387A JP6338775A JPS512681A JP S512681 A JPS512681 A JP S512681A JP 50063387 A JP50063387 A JP 50063387A JP 6338775 A JP6338775 A JP 6338775A JP S512681 A JPS512681 A JP S512681A
Authority
JP
Japan
Prior art keywords
shirikonno
epitakisharusooseichosaseruhoho
shirikonno epitakisharusooseichosaseruhoho
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50063387A
Other languages
English (en)
Other versions
JPS546036B2 (ja
Inventor
Goorudosumisu Nooman
Haabii Robinson Hooru
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RCA Corp
Original Assignee
RCA Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RCA Corp filed Critical RCA Corp
Publication of JPS512681A publication Critical patent/JPS512681A/ja
Publication of JPS546036B2 publication Critical patent/JPS546036B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/007—Autodoping
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/017—Clean surfaces

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP50063387A 1974-05-28 1975-05-26 Shirikonno epitakisharusooseichosaseruhoho Granted JPS512681A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/473,766 US3945864A (en) 1974-05-28 1974-05-28 Method of growing thick expitaxial layers of silicon

Publications (2)

Publication Number Publication Date
JPS512681A true JPS512681A (en) 1976-01-10
JPS546036B2 JPS546036B2 (ja) 1979-03-23

Family

ID=23880890

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50063387A Granted JPS512681A (en) 1974-05-28 1975-05-26 Shirikonno epitakisharusooseichosaseruhoho

Country Status (10)

Country Link
US (1) US3945864A (ja)
JP (1) JPS512681A (ja)
BE (1) BE829378A (ja)
DE (1) DE2523067B2 (ja)
FR (1) FR2272732B3 (ja)
GB (1) GB1490665A (ja)
IN (1) IN143139B (ja)
IT (1) IT1037445B (ja)
NL (1) NL7506225A (ja)
SE (1) SE7506031L (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4950605A (ja) * 1972-09-22 1974-05-16
JPH01301589A (ja) * 1988-03-14 1989-12-05 Epsilon Ltd Partnership 半導体材料のエピタキシャル成長方法

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4509162A (en) * 1980-10-28 1985-04-02 Quixote Corporation High density recording medium
US4549926A (en) * 1982-01-12 1985-10-29 Rca Corporation Method for growing monocrystalline silicon on a mask layer
IN157312B (ja) * 1982-01-12 1986-03-01 Rca Corp
US4482422A (en) * 1982-02-26 1984-11-13 Rca Corporation Method for growing a low defect monocrystalline layer on a mask
US4497683A (en) * 1982-05-03 1985-02-05 At&T Bell Laboratories Process for producing dielectrically isolated silicon devices
US4460416A (en) * 1982-12-15 1984-07-17 Burroughs Corporation Method for fabricating in-situ doped polysilicon employing overdamped gradually increasing gas flow rates with constant flow rate ratio
US4578142A (en) * 1984-05-10 1986-03-25 Rca Corporation Method for growing monocrystalline silicon through mask layer
US4592792A (en) * 1985-01-23 1986-06-03 Rca Corporation Method for forming uniformly thick selective epitaxial silicon
US4698316A (en) * 1985-01-23 1987-10-06 Rca Corporation Method of depositing uniformly thick selective epitaxial silicon
JPH0639357B2 (ja) * 1986-09-08 1994-05-25 新技術開発事業団 元素半導体単結晶薄膜の成長方法
JPH05217921A (ja) * 1991-09-13 1993-08-27 Motorola Inc 材料膜のエピタキシアル成長を行うための温度制御された処理
EP0718873A3 (en) 1994-12-21 1998-04-15 MEMC Electronic Materials, Inc. Cleaning process for hydrophobic silicon wafers
JP3444327B2 (ja) * 1996-03-04 2003-09-08 信越半導体株式会社 シリコン単結晶薄膜の製造方法
US6703290B2 (en) 1999-07-14 2004-03-09 Seh America, Inc. Growth of epitaxial semiconductor material with improved crystallographic properties
US6190453B1 (en) 1999-07-14 2001-02-20 Seh America, Inc. Growth of epitaxial semiconductor material with improved crystallographic properties
US6489241B1 (en) 1999-09-17 2002-12-03 Applied Materials, Inc. Apparatus and method for surface finishing a silicon film
DE19960823B4 (de) * 1999-12-16 2007-04-12 Siltronic Ag Verfahren zur Herstellung einer epitaxierten Halbleiterscheibe und deren Verwendung
US6774040B2 (en) * 2002-09-12 2004-08-10 Applied Materials, Inc. Apparatus and method for surface finishing a silicon film
JP4266122B2 (ja) * 2002-11-18 2009-05-20 コバレントマテリアル株式会社 半導体基板の製造方法
WO2021030235A2 (en) 2019-08-09 2021-02-18 Leading Edge Equipment Technologies, Inc. Wafer with regions of low oxygen concentration
MX2022001458A (es) 2019-08-09 2022-06-08 Leading Edge Equipment Tech Inc Produccion de una cinta u oblea con regiones de baja concentracion de oxigeno.
CN116525418B (zh) * 2023-06-09 2023-09-15 中电科先进材料技术创新有限公司 基于111晶向的硅外延片制备方法、硅外延片及半导体器件
CN119859846B (zh) * 2025-03-21 2025-06-24 中国电子科技集团公司第四十六研究所 一种半导体功率器件用超薄衬底沉积厚层硅外延片的方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3243323A (en) * 1962-06-11 1966-03-29 Motorola Inc Gas etching
US3512056A (en) * 1967-04-25 1970-05-12 Westinghouse Electric Corp Double epitaxial layer high power,high speed transistor
US3501336A (en) * 1967-12-11 1970-03-17 Texas Instruments Inc Method for etching single crystal silicon substrates and depositing silicon thereon
DE1900116C3 (de) * 1969-01-02 1978-10-19 Siemens Ag, 1000 Berlin Und 8000 Muenchen Verfahren zum Herstellen hxxochreiner, aus Silicium bestehender einkristalliner Schichten

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4950605A (ja) * 1972-09-22 1974-05-16
JPH01301589A (ja) * 1988-03-14 1989-12-05 Epsilon Ltd Partnership 半導体材料のエピタキシャル成長方法

Also Published As

Publication number Publication date
US3945864A (en) 1976-03-23
GB1490665A (en) 1977-11-02
DE2523067B2 (de) 1978-12-14
IT1037445B (it) 1979-11-10
IN143139B (ja) 1977-10-08
NL7506225A (nl) 1975-12-02
FR2272732B3 (ja) 1978-12-01
AU8142375A (en) 1976-11-25
FR2272732A1 (ja) 1975-12-26
BE829378A (fr) 1975-09-15
SE7506031L (sv) 1975-12-01
DE2523067A1 (de) 1975-12-18
JPS546036B2 (ja) 1979-03-23

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