JPS5127826A - Himakukeiseisochi - Google Patents

Himakukeiseisochi

Info

Publication number
JPS5127826A
JPS5127826A JP9986674A JP9986674A JPS5127826A JP S5127826 A JPS5127826 A JP S5127826A JP 9986674 A JP9986674 A JP 9986674A JP 9986674 A JP9986674 A JP 9986674A JP S5127826 A JPS5127826 A JP S5127826A
Authority
JP
Japan
Prior art keywords
himakukeiseisochi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9986674A
Other languages
English (en)
Inventor
Chikara Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Nihon Shinku Gijutsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc, Nihon Shinku Gijutsu KK filed Critical Ulvac Inc
Priority to JP9986674A priority Critical patent/JPS5127826A/ja
Publication of JPS5127826A publication Critical patent/JPS5127826A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP9986674A 1974-09-02 1974-09-02 Himakukeiseisochi Pending JPS5127826A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9986674A JPS5127826A (ja) 1974-09-02 1974-09-02 Himakukeiseisochi

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9986674A JPS5127826A (ja) 1974-09-02 1974-09-02 Himakukeiseisochi

Publications (1)

Publication Number Publication Date
JPS5127826A true JPS5127826A (ja) 1976-03-09

Family

ID=14258716

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9986674A Pending JPS5127826A (ja) 1974-09-02 1974-09-02 Himakukeiseisochi

Country Status (1)

Country Link
JP (1) JPS5127826A (ja)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4879736A (ja) * 1972-01-27 1973-10-25
JPS4929818A (ja) * 1972-07-13 1974-03-16

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4879736A (ja) * 1972-01-27 1973-10-25
JPS4929818A (ja) * 1972-07-13 1974-03-16

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