JPS5129988A - Hyomenkensahoho - Google Patents

Hyomenkensahoho

Info

Publication number
JPS5129988A
JPS5129988A JP10267974A JP10267974A JPS5129988A JP S5129988 A JPS5129988 A JP S5129988A JP 10267974 A JP10267974 A JP 10267974A JP 10267974 A JP10267974 A JP 10267974A JP S5129988 A JPS5129988 A JP S5129988A
Authority
JP
Japan
Prior art keywords
hyomenkensahoho
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10267974A
Other languages
English (en)
Other versions
JPS5933855B2 (ja
Inventor
Masamichi Yataki
Hideyo Takahata
Tadao Shimomura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP10267974A priority Critical patent/JPS5933855B2/ja
Publication of JPS5129988A publication Critical patent/JPS5129988A/ja
Priority to US05/784,328 priority patent/US4097160A/en
Publication of JPS5933855B2 publication Critical patent/JPS5933855B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP10267974A 1974-09-06 1974-09-06 表面検査方法 Expired JPS5933855B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP10267974A JPS5933855B2 (ja) 1974-09-06 1974-09-06 表面検査方法
US05/784,328 US4097160A (en) 1974-09-06 1977-04-04 Method for inspecting object defection by light beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10267974A JPS5933855B2 (ja) 1974-09-06 1974-09-06 表面検査方法

Publications (2)

Publication Number Publication Date
JPS5129988A true JPS5129988A (ja) 1976-03-13
JPS5933855B2 JPS5933855B2 (ja) 1984-08-18

Family

ID=14333908

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10267974A Expired JPS5933855B2 (ja) 1974-09-06 1974-09-06 表面検査方法

Country Status (1)

Country Link
JP (1) JPS5933855B2 (ja)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS543587A (en) * 1977-06-10 1979-01-11 Hitachi Ltd Inspecting apparatus
JPS5447696A (en) * 1977-09-21 1979-04-14 Nippon Keisoku Kougiyou Kk Tester for lighttpermeable body
JPS5759153A (en) * 1980-09-25 1982-04-09 Hitachi Zosen Corp Detector for surface characteristic
JPS58200138A (ja) * 1982-05-18 1983-11-21 Toshiba Corp 表面検査装置
JPS6069539A (ja) * 1983-09-26 1985-04-20 Toshiba Corp 表面欠陥検査装置
JPS63284455A (ja) * 1987-05-15 1988-11-21 Kobe Steel Ltd 表面欠陥検査装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS543587A (en) * 1977-06-10 1979-01-11 Hitachi Ltd Inspecting apparatus
JPS5447696A (en) * 1977-09-21 1979-04-14 Nippon Keisoku Kougiyou Kk Tester for lighttpermeable body
JPS5759153A (en) * 1980-09-25 1982-04-09 Hitachi Zosen Corp Detector for surface characteristic
JPS58200138A (ja) * 1982-05-18 1983-11-21 Toshiba Corp 表面検査装置
JPS6069539A (ja) * 1983-09-26 1985-04-20 Toshiba Corp 表面欠陥検査装置
JPS63284455A (ja) * 1987-05-15 1988-11-21 Kobe Steel Ltd 表面欠陥検査装置

Also Published As

Publication number Publication date
JPS5933855B2 (ja) 1984-08-18

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