JPS5130477A - - Google Patents

Info

Publication number
JPS5130477A
JPS5130477A JP49103665A JP10366574A JPS5130477A JP S5130477 A JPS5130477 A JP S5130477A JP 49103665 A JP49103665 A JP 49103665A JP 10366574 A JP10366574 A JP 10366574A JP S5130477 A JPS5130477 A JP S5130477A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP49103665A
Other languages
Japanese (ja)
Inventor
Harushige Kurokawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Denki Electric Inc
Original Assignee
Kokusai Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusai Electric Co Ltd filed Critical Kokusai Electric Co Ltd
Priority to JP49103665A priority Critical patent/JPS5130477A/ja
Publication of JPS5130477A publication Critical patent/JPS5130477A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP49103665A 1974-09-09 1974-09-09 Pending JPS5130477A (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP49103665A JPS5130477A (cs) 1974-09-09 1974-09-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49103665A JPS5130477A (cs) 1974-09-09 1974-09-09

Publications (1)

Publication Number Publication Date
JPS5130477A true JPS5130477A (cs) 1976-03-15

Family

ID=14360068

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49103665A Pending JPS5130477A (cs) 1974-09-09 1974-09-09

Country Status (1)

Country Link
JP (1) JPS5130477A (cs)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5588840A (en) * 1978-12-27 1980-07-04 Hitachi Ltd Heating reaction furnace
JPS60119743U (ja) * 1984-01-23 1985-08-13 サンケン電気株式会社 化学的気相付着装置
JPH027419A (ja) * 1988-06-24 1990-01-11 Toshiba Mach Co Ltd 気相成長装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS482782U (cs) * 1971-05-21 1973-01-13
JPS4828281U (cs) * 1971-08-06 1973-04-06
JPS498167A (cs) * 1972-05-10 1974-01-24

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS482782U (cs) * 1971-05-21 1973-01-13
JPS4828281U (cs) * 1971-08-06 1973-04-06
JPS498167A (cs) * 1972-05-10 1974-01-24

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5588840A (en) * 1978-12-27 1980-07-04 Hitachi Ltd Heating reaction furnace
JPS60119743U (ja) * 1984-01-23 1985-08-13 サンケン電気株式会社 化学的気相付着装置
JPH027419A (ja) * 1988-06-24 1990-01-11 Toshiba Mach Co Ltd 気相成長装置

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