JPS5130516A - NETSUSHORIHOHO - Google Patents

NETSUSHORIHOHO

Info

Publication number
JPS5130516A
JPS5130516A JP10420374A JP10420374A JPS5130516A JP S5130516 A JPS5130516 A JP S5130516A JP 10420374 A JP10420374 A JP 10420374A JP 10420374 A JP10420374 A JP 10420374A JP S5130516 A JPS5130516 A JP S5130516A
Authority
JP
Japan
Prior art keywords
netsushorihoho
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10420374A
Other languages
Japanese (ja)
Inventor
Tooru Nunoi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP10420374A priority Critical patent/JPS5130516A/en
Publication of JPS5130516A publication Critical patent/JPS5130516A/en
Pending legal-status Critical Current

Links

Landscapes

  • Muffle Furnaces And Rotary Kilns (AREA)
JP10420374A 1974-09-09 1974-09-09 NETSUSHORIHOHO Pending JPS5130516A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10420374A JPS5130516A (en) 1974-09-09 1974-09-09 NETSUSHORIHOHO

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10420374A JPS5130516A (en) 1974-09-09 1974-09-09 NETSUSHORIHOHO

Publications (1)

Publication Number Publication Date
JPS5130516A true JPS5130516A (en) 1976-03-15

Family

ID=14374401

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10420374A Pending JPS5130516A (en) 1974-09-09 1974-09-09 NETSUSHORIHOHO

Country Status (1)

Country Link
JP (1) JPS5130516A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6235518A (en) * 1985-08-08 1987-02-16 Deisuko Saiyaa Japan:Kk Method and device for preventing outside air from entering vertical semiconductor heat treatment equipment

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6235518A (en) * 1985-08-08 1987-02-16 Deisuko Saiyaa Japan:Kk Method and device for preventing outside air from entering vertical semiconductor heat treatment equipment

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