JPS5132272A - Handotaisochinoseizohoho - Google Patents

Handotaisochinoseizohoho

Info

Publication number
JPS5132272A
JPS5132272A JP10500374A JP10500374A JPS5132272A JP S5132272 A JPS5132272 A JP S5132272A JP 10500374 A JP10500374 A JP 10500374A JP 10500374 A JP10500374 A JP 10500374A JP S5132272 A JPS5132272 A JP S5132272A
Authority
JP
Japan
Prior art keywords
handotaisochinoseizohoho
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10500374A
Other languages
English (en)
Inventor
Yasuo Wada
Hiroo Usui
Tetsuichi Hashimoto
Mikio Ashikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10500374A priority Critical patent/JPS5132272A/ja
Publication of JPS5132272A publication Critical patent/JPS5132272A/ja
Pending legal-status Critical Current

Links

JP10500374A 1974-09-13 1974-09-13 Handotaisochinoseizohoho Pending JPS5132272A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10500374A JPS5132272A (ja) 1974-09-13 1974-09-13 Handotaisochinoseizohoho

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10500374A JPS5132272A (ja) 1974-09-13 1974-09-13 Handotaisochinoseizohoho

Publications (1)

Publication Number Publication Date
JPS5132272A true JPS5132272A (ja) 1976-03-18

Family

ID=14395892

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10500374A Pending JPS5132272A (ja) 1974-09-13 1974-09-13 Handotaisochinoseizohoho

Country Status (1)

Country Link
JP (1) JPS5132272A (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5390757A (en) * 1977-01-20 1978-08-09 Toshiba Corp Production of semiconductor device
JPS58176930A (ja) * 1982-04-12 1983-10-17 Yukio Yasuda 半導体装置の製造方法
JPS59111373A (ja) * 1982-12-16 1984-06-27 Matsushita Electric Ind Co Ltd 化合物半導体基板およびその製造方法
WO1999013502A1 (fr) * 1997-09-08 1999-03-18 Hitachi, Ltd. Procede de fabrication de substrat de semi-conducteur forme par epitaxie

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5390757A (en) * 1977-01-20 1978-08-09 Toshiba Corp Production of semiconductor device
JPS58176930A (ja) * 1982-04-12 1983-10-17 Yukio Yasuda 半導体装置の製造方法
JPS59111373A (ja) * 1982-12-16 1984-06-27 Matsushita Electric Ind Co Ltd 化合物半導体基板およびその製造方法
WO1999013502A1 (fr) * 1997-09-08 1999-03-18 Hitachi, Ltd. Procede de fabrication de substrat de semi-conducteur forme par epitaxie

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