JPS5132488A - Ekisoseichohoho - Google Patents

Ekisoseichohoho

Info

Publication number
JPS5132488A
JPS5132488A JP10649074A JP10649074A JPS5132488A JP S5132488 A JPS5132488 A JP S5132488A JP 10649074 A JP10649074 A JP 10649074A JP 10649074 A JP10649074 A JP 10649074A JP S5132488 A JPS5132488 A JP S5132488A
Authority
JP
Japan
Prior art keywords
ekisoseichohoho
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10649074A
Other languages
English (en)
Inventor
Fumiaki Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP10649074A priority Critical patent/JPS5132488A/ja
Publication of JPS5132488A publication Critical patent/JPS5132488A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP10649074A 1974-09-14 1974-09-14 Ekisoseichohoho Pending JPS5132488A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10649074A JPS5132488A (ja) 1974-09-14 1974-09-14 Ekisoseichohoho

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10649074A JPS5132488A (ja) 1974-09-14 1974-09-14 Ekisoseichohoho

Publications (1)

Publication Number Publication Date
JPS5132488A true JPS5132488A (ja) 1976-03-19

Family

ID=14434888

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10649074A Pending JPS5132488A (ja) 1974-09-14 1974-09-14 Ekisoseichohoho

Country Status (1)

Country Link
JP (1) JPS5132488A (ja)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4880275A (ja) * 1972-01-28 1973-10-27
JPS4945682A (ja) * 1972-09-01 1974-05-01

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4880275A (ja) * 1972-01-28 1973-10-27
JPS4945682A (ja) * 1972-09-01 1974-05-01

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