JPS5138285A - Denkaijochakuho - Google Patents

Denkaijochakuho

Info

Publication number
JPS5138285A
JPS5138285A JP11163374A JP11163374A JPS5138285A JP S5138285 A JPS5138285 A JP S5138285A JP 11163374 A JP11163374 A JP 11163374A JP 11163374 A JP11163374 A JP 11163374A JP S5138285 A JPS5138285 A JP S5138285A
Authority
JP
Japan
Prior art keywords
jochakuho
denkai
denkai jochakuho
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11163374A
Other languages
English (en)
Inventor
Kazuo Nakamura
Yoshito Fukube
Hayakazu Fujiwara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Nihon Shinku Gijutsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc, Nihon Shinku Gijutsu KK filed Critical Ulvac Inc
Priority to JP11163374A priority Critical patent/JPS5138285A/ja
Publication of JPS5138285A publication Critical patent/JPS5138285A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
JP11163374A 1974-09-30 1974-09-30 Denkaijochakuho Pending JPS5138285A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11163374A JPS5138285A (ja) 1974-09-30 1974-09-30 Denkaijochakuho

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11163374A JPS5138285A (ja) 1974-09-30 1974-09-30 Denkaijochakuho

Publications (1)

Publication Number Publication Date
JPS5138285A true JPS5138285A (ja) 1976-03-30

Family

ID=14566247

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11163374A Pending JPS5138285A (ja) 1974-09-30 1974-09-30 Denkaijochakuho

Country Status (1)

Country Link
JP (1) JPS5138285A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53131984A (en) * 1977-04-25 1978-11-17 Nippon Electron Optics Lab Ion plating apparatus

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4934483A (ja) * 1972-07-31 1974-03-29

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4934483A (ja) * 1972-07-31 1974-03-29

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53131984A (en) * 1977-04-25 1978-11-17 Nippon Electron Optics Lab Ion plating apparatus

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