JPS5140976A - Hyomenkensaho - Google Patents

Hyomenkensaho

Info

Publication number
JPS5140976A
JPS5140976A JP11361074A JP11361074A JPS5140976A JP S5140976 A JPS5140976 A JP S5140976A JP 11361074 A JP11361074 A JP 11361074A JP 11361074 A JP11361074 A JP 11361074A JP S5140976 A JPS5140976 A JP S5140976A
Authority
JP
Japan
Prior art keywords
hyomenkensaho
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11361074A
Other languages
English (en)
Other versions
JPS5918655B2 (ja
Inventor
Masamichi Yataki
Hideyo Takahata
Tadao Shimomura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP11361074A priority Critical patent/JPS5918655B2/ja
Publication of JPS5140976A publication Critical patent/JPS5140976A/ja
Priority to US05/784,328 priority patent/US4097160A/en
Publication of JPS5918655B2 publication Critical patent/JPS5918655B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP11361074A 1974-09-06 1974-10-02 表面検査法 Expired JPS5918655B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP11361074A JPS5918655B2 (ja) 1974-10-02 1974-10-02 表面検査法
US05/784,328 US4097160A (en) 1974-09-06 1977-04-04 Method for inspecting object defection by light beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11361074A JPS5918655B2 (ja) 1974-10-02 1974-10-02 表面検査法

Publications (2)

Publication Number Publication Date
JPS5140976A true JPS5140976A (ja) 1976-04-06
JPS5918655B2 JPS5918655B2 (ja) 1984-04-28

Family

ID=14616569

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11361074A Expired JPS5918655B2 (ja) 1974-09-06 1974-10-02 表面検査法

Country Status (1)

Country Link
JP (1) JPS5918655B2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57114842A (en) * 1980-11-24 1982-07-16 Cegedur Optically monitoring method of and apparatus for surface state of metal products
JPS59168311A (ja) * 1983-03-15 1984-09-22 Hamamatsu Photonics Kk 物体表面の変形を検出する装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57114842A (en) * 1980-11-24 1982-07-16 Cegedur Optically monitoring method of and apparatus for surface state of metal products
JPS59168311A (ja) * 1983-03-15 1984-09-22 Hamamatsu Photonics Kk 物体表面の変形を検出する装置

Also Published As

Publication number Publication date
JPS5918655B2 (ja) 1984-04-28

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