JPS5143959A - Pataanno ketsukankensasochi - Google Patents

Pataanno ketsukankensasochi

Info

Publication number
JPS5143959A
JPS5143959A JP11751874A JP11751874A JPS5143959A JP S5143959 A JPS5143959 A JP S5143959A JP 11751874 A JP11751874 A JP 11751874A JP 11751874 A JP11751874 A JP 11751874A JP S5143959 A JPS5143959 A JP S5143959A
Authority
JP
Japan
Prior art keywords
pataanno
ketsukankensasochi
pataanno ketsukankensasochi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11751874A
Other languages
Japanese (ja)
Other versions
JPS582450B2 (en
Inventor
Yasushi Uchama
Daikichi Awamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON JIDO SEIGYO KK
Original Assignee
NIPPON JIDO SEIGYO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON JIDO SEIGYO KK filed Critical NIPPON JIDO SEIGYO KK
Priority to JP49117518A priority Critical patent/JPS582450B2/en
Publication of JPS5143959A publication Critical patent/JPS5143959A/en
Publication of JPS582450B2 publication Critical patent/JPS582450B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP49117518A 1974-10-12 1974-10-12 Pattern defect inspection equipment Expired JPS582450B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP49117518A JPS582450B2 (en) 1974-10-12 1974-10-12 Pattern defect inspection equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49117518A JPS582450B2 (en) 1974-10-12 1974-10-12 Pattern defect inspection equipment

Publications (2)

Publication Number Publication Date
JPS5143959A true JPS5143959A (en) 1976-04-15
JPS582450B2 JPS582450B2 (en) 1983-01-17

Family

ID=14713739

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49117518A Expired JPS582450B2 (en) 1974-10-12 1974-10-12 Pattern defect inspection equipment

Country Status (1)

Country Link
JP (1) JPS582450B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS567053U (en) * 1979-06-27 1981-01-22
JPH01307647A (en) * 1988-06-03 1989-12-12 Dainippon Printing Co Ltd Inspecting method for periodic pattern
JP2002222751A (en) * 2001-01-25 2002-08-09 Nitto Kogaku Kk Aligner and assembling device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4997648A (en) * 1973-01-18 1974-09-14

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4997648A (en) * 1973-01-18 1974-09-14

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS567053U (en) * 1979-06-27 1981-01-22
JPH01307647A (en) * 1988-06-03 1989-12-12 Dainippon Printing Co Ltd Inspecting method for periodic pattern
JP2002222751A (en) * 2001-01-25 2002-08-09 Nitto Kogaku Kk Aligner and assembling device

Also Published As

Publication number Publication date
JPS582450B2 (en) 1983-01-17

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