JPS5146879A - Handotaisochino seizohoho - Google Patents

Handotaisochino seizohoho

Info

Publication number
JPS5146879A
JPS5146879A JP49120857A JP12085774A JPS5146879A JP S5146879 A JPS5146879 A JP S5146879A JP 49120857 A JP49120857 A JP 49120857A JP 12085774 A JP12085774 A JP 12085774A JP S5146879 A JPS5146879 A JP S5146879A
Authority
JP
Japan
Prior art keywords
handotaisochino seizohoho
handotaisochino
seizohoho
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP49120857A
Other languages
Japanese (ja)
Inventor
Yokutsugu Hamaguchi
Noboru Yuigami
Tatsuyuki Tomioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP49120857A priority Critical patent/JPS5146879A/en
Publication of JPS5146879A publication Critical patent/JPS5146879A/en
Pending legal-status Critical Current

Links

Landscapes

  • Pressure Sensors (AREA)
  • Weting (AREA)
JP49120857A 1974-10-18 1974-10-18 Handotaisochino seizohoho Pending JPS5146879A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP49120857A JPS5146879A (en) 1974-10-18 1974-10-18 Handotaisochino seizohoho

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49120857A JPS5146879A (en) 1974-10-18 1974-10-18 Handotaisochino seizohoho

Publications (1)

Publication Number Publication Date
JPS5146879A true JPS5146879A (en) 1976-04-21

Family

ID=14796655

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49120857A Pending JPS5146879A (en) 1974-10-18 1974-10-18 Handotaisochino seizohoho

Country Status (1)

Country Link
JP (1) JPS5146879A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5490971A (en) * 1977-12-28 1979-07-19 Matsushita Electric Ind Co Ltd Pattern forming method
JPS54106514U (en) * 1978-01-13 1979-07-26
JPS5495186A (en) * 1978-01-12 1979-07-27 Sanyo Electric Co Ltd Production of compound semiconductor device
JPS56103469A (en) * 1980-01-22 1981-08-18 Fujitsu Ltd Manufacture of semiconductor device
JP2003504221A (en) * 1999-07-13 2003-02-04 インプット／アウトプット，インコーポレーテッド Fine processing process of merged mask

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4939551A (en) * 1972-08-23 1974-04-13
JPS49106286A (en) * 1973-02-08 1974-10-08

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4939551A (en) * 1972-08-23 1974-04-13
JPS49106286A (en) * 1973-02-08 1974-10-08

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5490971A (en) * 1977-12-28 1979-07-19 Matsushita Electric Ind Co Ltd Pattern forming method
JPS5495186A (en) * 1978-01-12 1979-07-27 Sanyo Electric Co Ltd Production of compound semiconductor device
JPS54106514U (en) * 1978-01-13 1979-07-26
JPS56103469A (en) * 1980-01-22 1981-08-18 Fujitsu Ltd Manufacture of semiconductor device
JP2003504221A (en) * 1999-07-13 2003-02-04 インプット／アウトプット，インコーポレーテッド Fine processing process of merged mask
JP4851036B2 (en) * 1999-07-13 2012-01-11 アイオーエヌ ジオフィジカル コーポレーション Microfabrication process of merged mask

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