JPS5148947A - Indetsukusu supaasu bekutoruno seigyohoshiki - Google Patents

Indetsukusu supaasu bekutoruno seigyohoshiki

Info

Publication number
JPS5148947A
JPS5148947A JP12243774A JP12243774A JPS5148947A JP S5148947 A JPS5148947 A JP S5148947A JP 12243774 A JP12243774 A JP 12243774A JP 12243774 A JP12243774 A JP 12243774A JP S5148947 A JPS5148947 A JP S5148947A
Authority
JP
Japan
Prior art keywords
supaasu
seigyohoshiki
indetsukusu
bekutoruno
supaasu bekutoruno
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12243774A
Other languages
Japanese (ja)
Other versions
JPS5637582B2 (en
Inventor
Keiichiro Uchida
Kazuhiro Eguchi
Minoru Etsuno
Masanori Mogi
Takatoshi Muraoka
Shigeru Nagasawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP12243774A priority Critical patent/JPS5148947A/en
Publication of JPS5148947A publication Critical patent/JPS5148947A/en
Publication of JPS5637582B2 publication Critical patent/JPS5637582B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Complex Calculations (AREA)
JP12243774A 1974-10-25 1974-10-25 Indetsukusu supaasu bekutoruno seigyohoshiki Granted JPS5148947A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12243774A JPS5148947A (en) 1974-10-25 1974-10-25 Indetsukusu supaasu bekutoruno seigyohoshiki

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12243774A JPS5148947A (en) 1974-10-25 1974-10-25 Indetsukusu supaasu bekutoruno seigyohoshiki

Publications (2)

Publication Number Publication Date
JPS5148947A true JPS5148947A (en) 1976-04-27
JPS5637582B2 JPS5637582B2 (en) 1981-09-01

Family

ID=14835816

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12243774A Granted JPS5148947A (en) 1974-10-25 1974-10-25 Indetsukusu supaasu bekutoruno seigyohoshiki

Country Status (1)

Country Link
JP (1) JPS5148947A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4623425A (en) * 1983-04-28 1986-11-18 Sharp Kabushiki Kaisha Method of fabricating single-crystal substrates of silicon carbide

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4997537A (en) * 1973-01-18 1974-09-14

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4997537A (en) * 1973-01-18 1974-09-14

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4623425A (en) * 1983-04-28 1986-11-18 Sharp Kabushiki Kaisha Method of fabricating single-crystal substrates of silicon carbide

Also Published As

Publication number Publication date
JPS5637582B2 (en) 1981-09-01

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