JPS5148975A - - Google Patents
Info
- Publication number
- JPS5148975A JPS5148975A JP49123117A JP12311774A JPS5148975A JP S5148975 A JPS5148975 A JP S5148975A JP 49123117 A JP49123117 A JP 49123117A JP 12311774 A JP12311774 A JP 12311774A JP S5148975 A JPS5148975 A JP S5148975A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
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- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49123117A JPS5148975A (de) | 1974-10-25 | 1974-10-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49123117A JPS5148975A (de) | 1974-10-25 | 1974-10-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5148975A true JPS5148975A (de) | 1976-04-27 |
Family
ID=14852589
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49123117A Pending JPS5148975A (de) | 1974-10-25 | 1974-10-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5148975A (de) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5353974A (en) * | 1976-10-27 | 1978-05-16 | Cho Lsi Gijutsu Kenkyu Kumiai | Method of implanting ion and device therefor |
| DE2934601A1 (de) * | 1979-08-27 | 1981-03-19 | Yeda Research And Development Co. Ltd., Rehovot | Polymere masse |
| JPS5691366A (en) * | 1979-12-26 | 1981-07-24 | Fujitsu Ltd | Ion injector |
| JPS56126918A (en) * | 1980-03-11 | 1981-10-05 | Hitachi Ltd | Injecting device for ion |
| JPS58167987A (ja) * | 1982-03-29 | 1983-10-04 | Toshiba Corp | 粒子ビ−ム位置検出装置 |
| JPS6068542A (ja) * | 1983-09-22 | 1985-04-19 | Tokyo Erekutoron Kk | イオン注入装置 |
| JPS60258840A (ja) * | 1984-06-04 | 1985-12-20 | Mitsubishi Electric Corp | 反応性イオンビ−ムエツチング装置 |
-
1974
- 1974-10-25 JP JP49123117A patent/JPS5148975A/ja active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5353974A (en) * | 1976-10-27 | 1978-05-16 | Cho Lsi Gijutsu Kenkyu Kumiai | Method of implanting ion and device therefor |
| DE2934601A1 (de) * | 1979-08-27 | 1981-03-19 | Yeda Research And Development Co. Ltd., Rehovot | Polymere masse |
| DE2934601C2 (de) * | 1979-08-27 | 1987-04-09 | Yeda Research And Development Co., Ltd., Rehovot | Polymere Masse |
| JPS5691366A (en) * | 1979-12-26 | 1981-07-24 | Fujitsu Ltd | Ion injector |
| JPS56126918A (en) * | 1980-03-11 | 1981-10-05 | Hitachi Ltd | Injecting device for ion |
| JPS58167987A (ja) * | 1982-03-29 | 1983-10-04 | Toshiba Corp | 粒子ビ−ム位置検出装置 |
| JPS6068542A (ja) * | 1983-09-22 | 1985-04-19 | Tokyo Erekutoron Kk | イオン注入装置 |
| JPS60258840A (ja) * | 1984-06-04 | 1985-12-20 | Mitsubishi Electric Corp | 反応性イオンビ−ムエツチング装置 |