JPS5152276A - - Google Patents
Info
- Publication number
- JPS5152276A JPS5152276A JP49125435A JP12543574A JPS5152276A JP S5152276 A JPS5152276 A JP S5152276A JP 49125435 A JP49125435 A JP 49125435A JP 12543574 A JP12543574 A JP 12543574A JP S5152276 A JPS5152276 A JP S5152276A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49125435A JPS5152276A (ja) | 1974-11-01 | 1974-11-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49125435A JPS5152276A (ja) | 1974-11-01 | 1974-11-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5152276A true JPS5152276A (ja) | 1976-05-08 |
Family
ID=14910008
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49125435A Pending JPS5152276A (ja) | 1974-11-01 | 1974-11-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5152276A (ja) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5423464A (en) * | 1977-07-25 | 1979-02-22 | Jeol Ltd | Exhaust system for vacuum unit |
| JPS5789257U (ja) * | 1980-11-21 | 1982-06-02 | ||
| JPS5923443A (ja) * | 1982-07-28 | 1984-02-06 | Jeol Ltd | 電子顕微鏡等の真空排気装置 |
-
1974
- 1974-11-01 JP JP49125435A patent/JPS5152276A/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5423464A (en) * | 1977-07-25 | 1979-02-22 | Jeol Ltd | Exhaust system for vacuum unit |
| JPS5789257U (ja) * | 1980-11-21 | 1982-06-02 | ||
| JPS5923443A (ja) * | 1982-07-28 | 1984-02-06 | Jeol Ltd | 電子顕微鏡等の真空排気装置 |