JPS5154143U - - Google Patents

Info

Publication number
JPS5154143U
JPS5154143U JP12615174U JP12615174U JPS5154143U JP S5154143 U JPS5154143 U JP S5154143U JP 12615174 U JP12615174 U JP 12615174U JP 12615174 U JP12615174 U JP 12615174U JP S5154143 U JPS5154143 U JP S5154143U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12615174U
Other languages
Japanese (ja)
Other versions
JPS5520743Y2 (
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1974126151U priority Critical patent/JPS5520743Y2/ja
Publication of JPS5154143U publication Critical patent/JPS5154143U/ja
Application granted granted Critical
Publication of JPS5520743Y2 publication Critical patent/JPS5520743Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1974126151U 1974-10-21 1974-10-21 Expired JPS5520743Y2 ( )

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1974126151U JPS5520743Y2 ( ) 1974-10-21 1974-10-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1974126151U JPS5520743Y2 ( ) 1974-10-21 1974-10-21

Publications (2)

Publication Number Publication Date
JPS5154143U true JPS5154143U ( ) 1976-04-24
JPS5520743Y2 JPS5520743Y2 ( ) 1980-05-19

Family

ID=28377884

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1974126151U Expired JPS5520743Y2 ( ) 1974-10-21 1974-10-21

Country Status (1)

Country Link
JP (1) JPS5520743Y2 ( )

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62280357A (ja) * 1986-05-28 1987-12-05 Yoichi Murayama 電子ビ−ム蒸発イオンプレ−テイングとその装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4933890A ( ) * 1972-07-29 1974-03-28

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4933890A ( ) * 1972-07-29 1974-03-28

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62280357A (ja) * 1986-05-28 1987-12-05 Yoichi Murayama 電子ビ−ム蒸発イオンプレ−テイングとその装置

Also Published As

Publication number Publication date
JPS5520743Y2 ( ) 1980-05-19

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