JPS5154880A - IONPUREETEINGUSOCHI - Google Patents

IONPUREETEINGUSOCHI

Info

Publication number
JPS5154880A
JPS5154880A JP12942774A JP12942774A JPS5154880A JP S5154880 A JPS5154880 A JP S5154880A JP 12942774 A JP12942774 A JP 12942774A JP 12942774 A JP12942774 A JP 12942774A JP S5154880 A JPS5154880 A JP S5154880A
Authority
JP
Japan
Prior art keywords
ionpureeteingusochi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12942774A
Other languages
Japanese (ja)
Other versions
JPS5710185B2 (en
Inventor
Tomitaro Koyama
Saburo Shimoi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Shimadzu Seisakusho Ltd
Original Assignee
Shimadzu Corp
Shimadzu Seisakusho Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, Shimadzu Seisakusho Ltd filed Critical Shimadzu Corp
Priority to JP12942774A priority Critical patent/JPS5154880A/en
Publication of JPS5154880A publication Critical patent/JPS5154880A/en
Publication of JPS5710185B2 publication Critical patent/JPS5710185B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Physical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
JP12942774A 1974-11-08 1974-11-08 IONPUREETEINGUSOCHI Granted JPS5154880A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12942774A JPS5154880A (en) 1974-11-08 1974-11-08 IONPUREETEINGUSOCHI

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12942774A JPS5154880A (en) 1974-11-08 1974-11-08 IONPUREETEINGUSOCHI

Publications (2)

Publication Number Publication Date
JPS5154880A true JPS5154880A (en) 1976-05-14
JPS5710185B2 JPS5710185B2 (en) 1982-02-25

Family

ID=15009215

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12942774A Granted JPS5154880A (en) 1974-11-08 1974-11-08 IONPUREETEINGUSOCHI

Country Status (1)

Country Link
JP (1) JPS5154880A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS637157U (en) * 1986-06-30 1988-01-18

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS637157U (en) * 1986-06-30 1988-01-18

Also Published As

Publication number Publication date
JPS5710185B2 (en) 1982-02-25

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