JPS5158971A - ATSUMIKEI - Google Patents

ATSUMIKEI

Info

Publication number
JPS5158971A
JPS5158971A JP13328074A JP13328074A JPS5158971A JP S5158971 A JPS5158971 A JP S5158971A JP 13328074 A JP13328074 A JP 13328074A JP 13328074 A JP13328074 A JP 13328074A JP S5158971 A JPS5158971 A JP S5158971A
Authority
JP
Japan
Prior art keywords
atsumikei
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13328074A
Other languages
Japanese (ja)
Inventor
Shunsuke Kobayashi
Hitoshi Mata
Kyohiro Uehara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON NAITORONIKUSU KK
Original Assignee
NIPPON NAITORONIKUSU KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON NAITORONIKUSU KK filed Critical NIPPON NAITORONIKUSU KK
Priority to JP13328074A priority Critical patent/JPS5158971A/en
Publication of JPS5158971A publication Critical patent/JPS5158971A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP13328074A 1974-11-20 1974-11-20 ATSUMIKEI Pending JPS5158971A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13328074A JPS5158971A (en) 1974-11-20 1974-11-20 ATSUMIKEI

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13328074A JPS5158971A (en) 1974-11-20 1974-11-20 ATSUMIKEI

Publications (1)

Publication Number Publication Date
JPS5158971A true JPS5158971A (en) 1976-05-22

Family

ID=15100934

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13328074A Pending JPS5158971A (en) 1974-11-20 1974-11-20 ATSUMIKEI

Country Status (1)

Country Link
JP (1) JPS5158971A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56111998A (en) * 1980-02-11 1981-09-04 Tokyo Shibaura Electric Co Pressure signal transmitter
JPS56126704A (en) * 1980-02-08 1981-10-05 Rca Corp Thickness monitoring device for thin film
JPS58206905A (en) * 1982-05-01 1983-12-02 Yokogawa Hokushin Electric Corp Method and device for measuring thickness of sheet-like object
JPS5952705A (en) * 1982-09-20 1984-03-27 Fujitsu Ltd Fine interval measuring method
JPS5995406A (en) * 1982-11-24 1984-06-01 Fuji Electric Co Ltd Method for measuring thickness of thin film
JPS6175203A (en) * 1984-09-20 1986-04-17 Oak Seisakusho:Kk Apparatus for measuring thickness of film
JPS62165103A (en) * 1986-01-17 1987-07-21 Canon Inc Method for measuring film thickness
JPS6412529A (en) * 1987-07-07 1989-01-17 Sumitomo Gca Kk Development of wafer

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56126704A (en) * 1980-02-08 1981-10-05 Rca Corp Thickness monitoring device for thin film
JPS56111998A (en) * 1980-02-11 1981-09-04 Tokyo Shibaura Electric Co Pressure signal transmitter
JPS58206905A (en) * 1982-05-01 1983-12-02 Yokogawa Hokushin Electric Corp Method and device for measuring thickness of sheet-like object
JPS5952705A (en) * 1982-09-20 1984-03-27 Fujitsu Ltd Fine interval measuring method
JPS5995406A (en) * 1982-11-24 1984-06-01 Fuji Electric Co Ltd Method for measuring thickness of thin film
JPS6175203A (en) * 1984-09-20 1986-04-17 Oak Seisakusho:Kk Apparatus for measuring thickness of film
JPS62165103A (en) * 1986-01-17 1987-07-21 Canon Inc Method for measuring film thickness
JPS6412529A (en) * 1987-07-07 1989-01-17 Sumitomo Gca Kk Development of wafer

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