JPS5167675U - - Google Patents
Info
- Publication number
- JPS5167675U JPS5167675U JP14158474U JP14158474U JPS5167675U JP S5167675 U JPS5167675 U JP S5167675U JP 14158474 U JP14158474 U JP 14158474U JP 14158474 U JP14158474 U JP 14158474U JP S5167675 U JPS5167675 U JP S5167675U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electroplating Methods And Accessories (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14158474U JPS5513422Y2 (de) | 1974-11-22 | 1974-11-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14158474U JPS5513422Y2 (de) | 1974-11-22 | 1974-11-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5167675U true JPS5167675U (de) | 1976-05-28 |
| JPS5513422Y2 JPS5513422Y2 (de) | 1980-03-26 |
Family
ID=28421271
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14158474U Expired JPS5513422Y2 (de) | 1974-11-22 | 1974-11-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5513422Y2 (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2018172729A (ja) * | 2017-03-31 | 2018-11-08 | 株式会社ファルテック | めっき装置 |
| CN112513341A (zh) * | 2018-07-30 | 2021-03-16 | 雷纳技术有限责任公司 | 流发生器、淀积装置和用于淀积材料的方法 |
-
1974
- 1974-11-22 JP JP14158474U patent/JPS5513422Y2/ja not_active Expired
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2018172729A (ja) * | 2017-03-31 | 2018-11-08 | 株式会社ファルテック | めっき装置 |
| CN112513341A (zh) * | 2018-07-30 | 2021-03-16 | 雷纳技术有限责任公司 | 流发生器、淀积装置和用于淀积材料的方法 |
| EP3830320A1 (de) * | 2018-07-30 | 2021-06-09 | RENA Technologies GmbH | Strömungsgenerator, abscheidevorrichtung und verfahren zum abscheiden eines materials |
| JP2021532266A (ja) * | 2018-07-30 | 2021-11-25 | レナ テクノロジー ゲーエムベーハーRENA Technologies GmbH | フロー発生器、成膜装置及び材料の成膜方法 |
| JP2024037950A (ja) * | 2018-07-30 | 2024-03-19 | レナ テクノロジー ゲーエムベーハー | フロー発生器、成膜装置及び材料の成膜方法 |
| US12221713B2 (en) | 2018-07-30 | 2025-02-11 | RENA Technologies GmbH | Flow generator, deposition device and method for the deposition of a material |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5513422Y2 (de) | 1980-03-26 |