JPS5167902A - Kaitenkudosochi - Google Patents

Kaitenkudosochi

Info

Publication number
JPS5167902A
JPS5167902A JP49142113A JP14211374A JPS5167902A JP S5167902 A JPS5167902 A JP S5167902A JP 49142113 A JP49142113 A JP 49142113A JP 14211374 A JP14211374 A JP 14211374A JP S5167902 A JPS5167902 A JP S5167902A
Authority
JP
Japan
Prior art keywords
kaitenkudosochi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP49142113A
Other languages
English (en)
Other versions
JPS5640881B2 (ja
Inventor
Toshiki Matsumoto
Kazuji Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP49142113A priority Critical patent/JPS5167902A/ja
Publication of JPS5167902A publication Critical patent/JPS5167902A/ja
Publication of JPS5640881B2 publication Critical patent/JPS5640881B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Vibration Prevention Devices (AREA)
  • Motor Or Generator Frames (AREA)
JP49142113A 1974-12-10 1974-12-10 Kaitenkudosochi Granted JPS5167902A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP49142113A JPS5167902A (en) 1974-12-10 1974-12-10 Kaitenkudosochi

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49142113A JPS5167902A (en) 1974-12-10 1974-12-10 Kaitenkudosochi

Publications (2)

Publication Number Publication Date
JPS5167902A true JPS5167902A (en) 1976-06-12
JPS5640881B2 JPS5640881B2 (ja) 1981-09-24

Family

ID=15307708

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49142113A Granted JPS5167902A (en) 1974-12-10 1974-12-10 Kaitenkudosochi

Country Status (1)

Country Link
JP (1) JPS5167902A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51101809A (en) * 1975-03-05 1976-09-08 Matsushita Electric Industrial Co Ltd Kaitenkudosochi
JPWO2024202056A1 (ja) * 2023-03-31 2024-10-03

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51101809A (en) * 1975-03-05 1976-09-08 Matsushita Electric Industrial Co Ltd Kaitenkudosochi
JPWO2024202056A1 (ja) * 2023-03-31 2024-10-03
WO2024202056A1 (ja) * 2023-03-31 2024-10-03 株式会社ニコン 制振装置、露光装置、及び露光方法

Also Published As

Publication number Publication date
JPS5640881B2 (ja) 1981-09-24

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