JPS5169377A - - Google Patents

Info

Publication number
JPS5169377A
JPS5169377A JP50134106A JP13410675A JPS5169377A JP S5169377 A JPS5169377 A JP S5169377A JP 50134106 A JP50134106 A JP 50134106A JP 13410675 A JP13410675 A JP 13410675A JP S5169377 A JPS5169377 A JP S5169377A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50134106A
Other languages
Japanese (ja)
Other versions
JPS5343028B2 (pl
Inventor
Tadao Kachi
Tsuneaki Kamei
Keiji Myamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13410675A priority Critical patent/JPS5343028B2/ja
Publication of JPS5169377A publication Critical patent/JPS5169377A/ja
Publication of JPS5343028B2 publication Critical patent/JPS5343028B2/ja
Expired legal-status Critical Current

Links

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  • Element Separation (AREA)
JP13410675A 1975-11-10 1975-11-10 Expired JPS5343028B2 (pl)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13410675A JPS5343028B2 (pl) 1975-11-10 1975-11-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13410675A JPS5343028B2 (pl) 1975-11-10 1975-11-10

Publications (2)

Publication Number Publication Date
JPS5169377A true JPS5169377A (pl) 1976-06-15
JPS5343028B2 JPS5343028B2 (pl) 1978-11-16

Family

ID=15120580

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13410675A Expired JPS5343028B2 (pl) 1975-11-10 1975-11-10

Country Status (1)

Country Link
JP (1) JPS5343028B2 (pl)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55148466A (en) * 1979-05-10 1980-11-19 Nec Corp Cmos semiconductor device and its manufacture

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5023277A (pl) * 1973-06-29 1975-03-12

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5023277A (pl) * 1973-06-29 1975-03-12

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55148466A (en) * 1979-05-10 1980-11-19 Nec Corp Cmos semiconductor device and its manufacture

Also Published As

Publication number Publication date
JPS5343028B2 (pl) 1978-11-16

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