JPS5176074A - Handotaiuehaasenjosochi - Google Patents

Handotaiuehaasenjosochi

Info

Publication number
JPS5176074A
JPS5176074A JP71675A JP71675A JPS5176074A JP S5176074 A JPS5176074 A JP S5176074A JP 71675 A JP71675 A JP 71675A JP 71675 A JP71675 A JP 71675A JP S5176074 A JPS5176074 A JP S5176074A
Authority
JP
Japan
Prior art keywords
josochi
handotaiuehaasen
handotaiuehaasen josochi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP71675A
Other languages
English (en)
Inventor
Ayao Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Suwa Seikosha KK
Original Assignee
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Suwa Seikosha KK filed Critical Suwa Seikosha KK
Priority to JP71675A priority Critical patent/JPS5176074A/ja
Publication of JPS5176074A publication Critical patent/JPS5176074A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP71675A 1974-12-26 1974-12-26 Handotaiuehaasenjosochi Pending JPS5176074A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP71675A JPS5176074A (ja) 1974-12-26 1974-12-26 Handotaiuehaasenjosochi

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP71675A JPS5176074A (ja) 1974-12-26 1974-12-26 Handotaiuehaasenjosochi

Publications (1)

Publication Number Publication Date
JPS5176074A true JPS5176074A (ja) 1976-07-01

Family

ID=11481474

Family Applications (1)

Application Number Title Priority Date Filing Date
JP71675A Pending JPS5176074A (ja) 1974-12-26 1974-12-26 Handotaiuehaasenjosochi

Country Status (1)

Country Link
JP (1) JPS5176074A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57501257A (ja) * 1980-03-06 1982-07-15
JPH01210092A (ja) * 1988-02-18 1989-08-23 Sonitsuku Fueroo Kk 精密洗浄の乾燥方法
JPH0555547U (ja) * 1991-12-25 1993-07-23 大日本スクリーン製造株式会社 基板表面処理装置の温純水供給装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57501257A (ja) * 1980-03-06 1982-07-15
JPH01210092A (ja) * 1988-02-18 1989-08-23 Sonitsuku Fueroo Kk 精密洗浄の乾燥方法
JPH0555547U (ja) * 1991-12-25 1993-07-23 大日本スクリーン製造株式会社 基板表面処理装置の温純水供給装置

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