JPS5178690A - Uehaichiawasesochi - Google Patents

Uehaichiawasesochi

Info

Publication number
JPS5178690A
JPS5178690A JP336975A JP336975A JPS5178690A JP S5178690 A JPS5178690 A JP S5178690A JP 336975 A JP336975 A JP 336975A JP 336975 A JP336975 A JP 336975A JP S5178690 A JPS5178690 A JP S5178690A
Authority
JP
Japan
Prior art keywords
uehaichiawasesochi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP336975A
Other languages
English (en)
Other versions
JPS5811740B2 (ja
Inventor
Kazuhiro Sugita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP753369A priority Critical patent/JPS5811740B2/ja
Priority to CA242,588A priority patent/CA1044379A/en
Priority to US05/645,020 priority patent/US4103232A/en
Priority to GB53002/75A priority patent/GB1531429A/en
Priority to DE19752558963 priority patent/DE2558963A1/de
Priority to NL7515149A priority patent/NL7515149A/xx
Publication of JPS5178690A publication Critical patent/JPS5178690A/ja
Publication of JPS5811740B2 publication Critical patent/JPS5811740B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Multi-Process Working Machines And Systems (AREA)
  • Control Of Position Or Direction (AREA)
JP753369A 1974-12-28 1974-12-28 ウエハイチアワセソウチ Expired JPS5811740B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP753369A JPS5811740B2 (ja) 1974-12-28 1974-12-28 ウエハイチアワセソウチ
CA242,588A CA1044379A (en) 1974-12-28 1975-12-24 Wafer transfer device
US05/645,020 US4103232A (en) 1974-12-28 1975-12-29 Wafer transfer device
GB53002/75A GB1531429A (en) 1974-12-28 1975-12-29 Apparatus for handling semi-conductor wafers to facilitate making electrical tests on semiconductor devices and testing method
DE19752558963 DE2558963A1 (de) 1974-12-28 1975-12-29 Vorrichtung zur anbringung von halbleiterplaettchen
NL7515149A NL7515149A (nl) 1974-12-28 1975-12-29 Inrichting voor het hanteren van wafels van halfgeleidend materiaal.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP753369A JPS5811740B2 (ja) 1974-12-28 1974-12-28 ウエハイチアワセソウチ

Publications (2)

Publication Number Publication Date
JPS5178690A true JPS5178690A (ja) 1976-07-08
JPS5811740B2 JPS5811740B2 (ja) 1983-03-04

Family

ID=11555421

Family Applications (1)

Application Number Title Priority Date Filing Date
JP753369A Expired JPS5811740B2 (ja) 1974-12-28 1974-12-28 ウエハイチアワセソウチ

Country Status (1)

Country Link
JP (1) JPS5811740B2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5946029A (ja) * 1982-09-09 1984-03-15 Hitachi Ltd ウエハのプリアライメント装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS482565U (ja) * 1971-05-25 1973-01-12

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS482565U (ja) * 1971-05-25 1973-01-12

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5946029A (ja) * 1982-09-09 1984-03-15 Hitachi Ltd ウエハのプリアライメント装置

Also Published As

Publication number Publication date
JPS5811740B2 (ja) 1983-03-04

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