JPS5179650A - Supatsutaetsuchingusochi - Google Patents
SupatsutaetsuchingusochiInfo
- Publication number
- JPS5179650A JPS5179650A JP437375A JP437375A JPS5179650A JP S5179650 A JPS5179650 A JP S5179650A JP 437375 A JP437375 A JP 437375A JP 437375 A JP437375 A JP 437375A JP S5179650 A JPS5179650 A JP S5179650A
- Authority
- JP
- Japan
- Prior art keywords
- supatsutaetsu
- chingusochi
- supatsutaetsu chingusochi
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP437375A JPS5179650A (ja) | 1975-01-08 | 1975-01-08 | Supatsutaetsuchingusochi |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP437375A JPS5179650A (ja) | 1975-01-08 | 1975-01-08 | Supatsutaetsuchingusochi |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5179650A true JPS5179650A (ja) | 1976-07-12 |
Family
ID=11582549
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP437375A Pending JPS5179650A (ja) | 1975-01-08 | 1975-01-08 | Supatsutaetsuchingusochi |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5179650A (ja) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57202734A (en) * | 1981-06-09 | 1982-12-11 | Matsushita Electric Ind Co Ltd | Method and device for manufacturing of semiconductor |
| JPH02260632A (ja) * | 1989-03-31 | 1990-10-23 | Tokyo Electron Ltd | プラズマ処理装置 |
| JPH0610163A (ja) * | 1992-02-13 | 1994-01-18 | Hughes Aircraft Co | 固体の厚さプロフィルを変更するためのプログラムされたプラズマエッチング装置の運動装置 |
| JPH0617267A (ja) * | 1992-03-23 | 1994-01-25 | Hughes Aircraft Co | プラズマ補助化学エッチングにおける可変空間周波数制御方法および装置 |
-
1975
- 1975-01-08 JP JP437375A patent/JPS5179650A/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57202734A (en) * | 1981-06-09 | 1982-12-11 | Matsushita Electric Ind Co Ltd | Method and device for manufacturing of semiconductor |
| JPH02260632A (ja) * | 1989-03-31 | 1990-10-23 | Tokyo Electron Ltd | プラズマ処理装置 |
| JPH0610163A (ja) * | 1992-02-13 | 1994-01-18 | Hughes Aircraft Co | 固体の厚さプロフィルを変更するためのプログラムされたプラズマエッチング装置の運動装置 |
| JPH0617267A (ja) * | 1992-03-23 | 1994-01-25 | Hughes Aircraft Co | プラズマ補助化学エッチングにおける可変空間周波数制御方法および装置 |
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