JPS5187092A - Hyomenkensasochi - Google Patents

Hyomenkensasochi

Info

Publication number
JPS5187092A
JPS5187092A JP1153575A JP1153575A JPS5187092A JP S5187092 A JPS5187092 A JP S5187092A JP 1153575 A JP1153575 A JP 1153575A JP 1153575 A JP1153575 A JP 1153575A JP S5187092 A JPS5187092 A JP S5187092A
Authority
JP
Japan
Prior art keywords
hyomenkensasochi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1153575A
Other languages
English (en)
Inventor
Sei Higuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP1153575A priority Critical patent/JPS5187092A/ja
Publication of JPS5187092A publication Critical patent/JPS5187092A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP1153575A 1975-01-28 1975-01-28 Hyomenkensasochi Pending JPS5187092A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1153575A JPS5187092A (ja) 1975-01-28 1975-01-28 Hyomenkensasochi

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1153575A JPS5187092A (ja) 1975-01-28 1975-01-28 Hyomenkensasochi

Publications (1)

Publication Number Publication Date
JPS5187092A true JPS5187092A (ja) 1976-07-30

Family

ID=11780646

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1153575A Pending JPS5187092A (ja) 1975-01-28 1975-01-28 Hyomenkensasochi

Country Status (1)

Country Link
JP (1) JPS5187092A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61107143A (ja) * 1984-10-30 1986-05-26 Mitsubishi Electric Corp 光学的表面検査装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61107143A (ja) * 1984-10-30 1986-05-26 Mitsubishi Electric Corp 光学的表面検査装置

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