JPS5190604A - - Google Patents

Info

Publication number
JPS5190604A
JPS5190604A JP50013475A JP1347575A JPS5190604A JP S5190604 A JPS5190604 A JP S5190604A JP 50013475 A JP50013475 A JP 50013475A JP 1347575 A JP1347575 A JP 1347575A JP S5190604 A JPS5190604 A JP S5190604A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50013475A
Other languages
Japanese (ja)
Other versions
JPS5746544B2 (
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1347575A priority Critical patent/JPS5746544B2/ja
Publication of JPS5190604A publication Critical patent/JPS5190604A/ja
Publication of JPS5746544B2 publication Critical patent/JPS5746544B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
JP1347575A 1975-02-03 1975-02-03 Expired JPS5746544B2 ( )

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1347575A JPS5746544B2 ( ) 1975-02-03 1975-02-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1347575A JPS5746544B2 ( ) 1975-02-03 1975-02-03

Publications (2)

Publication Number Publication Date
JPS5190604A true JPS5190604A ( ) 1976-08-09
JPS5746544B2 JPS5746544B2 ( ) 1982-10-04

Family

ID=11834143

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1347575A Expired JPS5746544B2 ( ) 1975-02-03 1975-02-03

Country Status (1)

Country Link
JP (1) JPS5746544B2 ( )

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63161453A (ja) * 1986-12-25 1988-07-05 Kanto Kagaku Kk レジスト組成物を回収、再使用するための方法および装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6326642U ( ) * 1986-08-06 1988-02-22
JPH01134641U ( ) * 1988-03-10 1989-09-13

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63161453A (ja) * 1986-12-25 1988-07-05 Kanto Kagaku Kk レジスト組成物を回収、再使用するための方法および装置

Also Published As

Publication number Publication date
JPS5746544B2 ( ) 1982-10-04

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