JPS5192183A - - Google Patents

Info

Publication number
JPS5192183A
JPS5192183A JP50017067A JP1706775A JPS5192183A JP S5192183 A JPS5192183 A JP S5192183A JP 50017067 A JP50017067 A JP 50017067A JP 1706775 A JP1706775 A JP 1706775A JP S5192183 A JPS5192183 A JP S5192183A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50017067A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP50017067A priority Critical patent/JPS5192183A/ja
Publication of JPS5192183A publication Critical patent/JPS5192183A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Weting (AREA)
JP50017067A 1975-02-10 1975-02-10 Pending JPS5192183A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50017067A JPS5192183A (ja) 1975-02-10 1975-02-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50017067A JPS5192183A (ja) 1975-02-10 1975-02-10

Publications (1)

Publication Number Publication Date
JPS5192183A true JPS5192183A (ja) 1976-08-12

Family

ID=11933629

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50017067A Pending JPS5192183A (ja) 1975-02-10 1975-02-10

Country Status (1)

Country Link
JP (1) JPS5192183A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54113262A (en) * 1978-02-24 1979-09-04 Hitachi Ltd Mask inspection unit
JPS63257247A (ja) * 1987-04-14 1988-10-25 Fujitsu Ltd 半導体装置の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54113262A (en) * 1978-02-24 1979-09-04 Hitachi Ltd Mask inspection unit
JPS63257247A (ja) * 1987-04-14 1988-10-25 Fujitsu Ltd 半導体装置の製造方法

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