JPS51928B1 - - Google Patents
Info
- Publication number
- JPS51928B1 JPS51928B1 JP46043400A JP4340071A JPS51928B1 JP S51928 B1 JPS51928 B1 JP S51928B1 JP 46043400 A JP46043400 A JP 46043400A JP 4340071 A JP4340071 A JP 4340071A JP S51928 B1 JPS51928 B1 JP S51928B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32018—Glow discharge
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
- C21D1/74—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material
- C21D1/773—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material under reduced pressure or vacuum
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Analytical Chemistry (AREA)
- Thermal Sciences (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Furnace Details (AREA)
- Discharge Heating (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH923470A CH509411A (de) | 1970-06-18 | 1970-06-18 | Verfahren zur Erhitzung von Gegenständen und Einrichtung zur Durchführung des Verfahrens |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS51928B1 true JPS51928B1 (de) | 1976-01-12 |
Family
ID=4349799
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP46043400A Pending JPS51928B1 (de) | 1970-06-18 | 1971-06-18 |
Country Status (9)
| Country | Link |
|---|---|
| JP (1) | JPS51928B1 (de) |
| BE (1) | BE768243A (de) |
| CA (1) | CA957842A (de) |
| CH (1) | CH509411A (de) |
| DE (1) | DE2130035A1 (de) |
| FR (1) | FR2096240A5 (de) |
| GB (1) | GB1354766A (de) |
| LU (1) | LU63359A1 (de) |
| NL (1) | NL7108367A (de) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3029339C2 (de) * | 1979-09-14 | 1984-11-22 | Hitachi, Ltd., Tokio/Tokyo | Glimmentladungs-Oberflächenbehandlungsverfahren und -vorrichtung |
| CN104061781A (zh) * | 2014-07-04 | 2014-09-24 | 苏州普京真空技术有限公司 | 多级真空炉 |
-
1970
- 1970-06-18 CH CH923470A patent/CH509411A/de not_active IP Right Cessation
-
1971
- 1971-06-08 BE BE768243A patent/BE768243A/xx unknown
- 1971-06-11 FR FR7121282A patent/FR2096240A5/fr not_active Expired
- 1971-06-11 GB GB2752771A patent/GB1354766A/en not_active Expired
- 1971-06-17 CA CA115,916A patent/CA957842A/en not_active Expired
- 1971-06-17 LU LU63359D patent/LU63359A1/xx unknown
- 1971-06-17 NL NL7108367A patent/NL7108367A/xx unknown
- 1971-06-18 DE DE19712130035 patent/DE2130035A1/de active Pending
- 1971-06-18 JP JP46043400A patent/JPS51928B1/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| CA957842A (en) | 1974-11-19 |
| FR2096240A5 (de) | 1972-02-11 |
| LU63359A1 (de) | 1971-09-20 |
| CH509411A (de) | 1971-06-30 |
| NL7108367A (de) | 1971-12-21 |
| GB1354766A (en) | 1974-06-05 |
| BE768243A (fr) | 1971-11-03 |
| DE2130035A1 (de) | 1972-01-05 |