JPS5199971A - Taketsushobubunofukumuepitakisharusono seizohoho - Google Patents

Taketsushobubunofukumuepitakisharusono seizohoho

Info

Publication number
JPS5199971A
JPS5199971A JP2484175A JP2484175A JPS5199971A JP S5199971 A JPS5199971 A JP S5199971A JP 2484175 A JP2484175 A JP 2484175A JP 2484175 A JP2484175 A JP 2484175A JP S5199971 A JPS5199971 A JP S5199971A
Authority
JP
Japan
Prior art keywords
taketsushobubunofukumuepitakisharusono
seizohoho
taketsushobubunofukumuepitakisharusono seizohoho
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2484175A
Other languages
English (en)
Inventor
Mitsuru Sakamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP2484175A priority Critical patent/JPS5199971A/ja
Publication of JPS5199971A publication Critical patent/JPS5199971A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
  • Element Separation (AREA)
JP2484175A 1975-02-28 1975-02-28 Taketsushobubunofukumuepitakisharusono seizohoho Pending JPS5199971A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2484175A JPS5199971A (ja) 1975-02-28 1975-02-28 Taketsushobubunofukumuepitakisharusono seizohoho

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2484175A JPS5199971A (ja) 1975-02-28 1975-02-28 Taketsushobubunofukumuepitakisharusono seizohoho

Publications (1)

Publication Number Publication Date
JPS5199971A true JPS5199971A (ja) 1976-09-03

Family

ID=12149424

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2484175A Pending JPS5199971A (ja) 1975-02-28 1975-02-28 Taketsushobubunofukumuepitakisharusono seizohoho

Country Status (1)

Country Link
JP (1) JPS5199971A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4323417A (en) * 1980-05-06 1982-04-06 Texas Instruments Incorporated Method of producing monocrystal on insulator
US4555300A (en) * 1984-02-21 1985-11-26 North American Philips Corporation Method for producing single crystal layers on insulators
WO2023013483A1 (ja) * 2021-08-05 2023-02-09 東京エレクトロン株式会社 成膜方法及び成膜装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4323417A (en) * 1980-05-06 1982-04-06 Texas Instruments Incorporated Method of producing monocrystal on insulator
US4555300A (en) * 1984-02-21 1985-11-26 North American Philips Corporation Method for producing single crystal layers on insulators
WO2023013483A1 (ja) * 2021-08-05 2023-02-09 東京エレクトロン株式会社 成膜方法及び成膜装置

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