JPS52107772A - Apparatus for controlling epitaxial growth - Google Patents

Apparatus for controlling epitaxial growth

Info

Publication number
JPS52107772A
JPS52107772A JP2452076A JP2452076A JPS52107772A JP S52107772 A JPS52107772 A JP S52107772A JP 2452076 A JP2452076 A JP 2452076A JP 2452076 A JP2452076 A JP 2452076A JP S52107772 A JPS52107772 A JP S52107772A
Authority
JP
Japan
Prior art keywords
epitaxial growth
controlling epitaxial
controlling
growth
epitaxial
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2452076A
Other languages
Japanese (ja)
Inventor
Ikuo Yasui
Tetsuo Iwasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KANEMATSU SEMIKONDAKUTAA KK
Original Assignee
KANEMATSU SEMIKONDAKUTAA KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KANEMATSU SEMIKONDAKUTAA KK filed Critical KANEMATSU SEMIKONDAKUTAA KK
Priority to JP2452076A priority Critical patent/JPS52107772A/en
Publication of JPS52107772A publication Critical patent/JPS52107772A/en
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP2452076A 1976-03-06 1976-03-06 Apparatus for controlling epitaxial growth Pending JPS52107772A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2452076A JPS52107772A (en) 1976-03-06 1976-03-06 Apparatus for controlling epitaxial growth

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2452076A JPS52107772A (en) 1976-03-06 1976-03-06 Apparatus for controlling epitaxial growth

Publications (1)

Publication Number Publication Date
JPS52107772A true JPS52107772A (en) 1977-09-09

Family

ID=12140434

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2452076A Pending JPS52107772A (en) 1976-03-06 1976-03-06 Apparatus for controlling epitaxial growth

Country Status (1)

Country Link
JP (1) JPS52107772A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6132511A (en) * 1984-07-25 1986-02-15 Toshiba Mach Co Ltd Processing device for vapor growth and the like
JPS61123130A (en) * 1984-11-20 1986-06-11 Toshiba Mach Co Ltd Slip preventing method in vapor growth
JPS61150321A (en) * 1984-12-25 1986-07-09 Toshiba Mach Co Ltd Method of treatments such as vapor growth or the like

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
SOLID STATE TECHNOLOGY=1972 *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6132511A (en) * 1984-07-25 1986-02-15 Toshiba Mach Co Ltd Processing device for vapor growth and the like
JPS61123130A (en) * 1984-11-20 1986-06-11 Toshiba Mach Co Ltd Slip preventing method in vapor growth
JPS61150321A (en) * 1984-12-25 1986-07-09 Toshiba Mach Co Ltd Method of treatments such as vapor growth or the like

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