JPS52115656A - Composite electronic microscope - Google Patents

Composite electronic microscope

Info

Publication number
JPS52115656A
JPS52115656A JP3216076A JP3216076A JPS52115656A JP S52115656 A JPS52115656 A JP S52115656A JP 3216076 A JP3216076 A JP 3216076A JP 3216076 A JP3216076 A JP 3216076A JP S52115656 A JPS52115656 A JP S52115656A
Authority
JP
Japan
Prior art keywords
electronic microscope
transmissive
composite electronic
microscope
block
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3216076A
Other languages
Japanese (ja)
Inventor
Moriki Kubozoe
Yoshihisa Namikawa
Shinjiro Katagiri
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3216076A priority Critical patent/JPS52115656A/en
Publication of JPS52115656A publication Critical patent/JPS52115656A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To make the functions as both transmissive and scanning electronic microscopes performed in their supreme condition, by providing a block indluding an objective lens, a deflecting device, and a specimen stand for exclusive use in the scanning microscope in such a manner that the power of each lens of the transmissive electronic microscope is not deteriorated, and using the block in combination with the transmissive electronic microscope system.
COPYRIGHT: (C)1977,JPO&Japio
JP3216076A 1976-03-24 1976-03-24 Composite electronic microscope Pending JPS52115656A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3216076A JPS52115656A (en) 1976-03-24 1976-03-24 Composite electronic microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3216076A JPS52115656A (en) 1976-03-24 1976-03-24 Composite electronic microscope

Publications (1)

Publication Number Publication Date
JPS52115656A true JPS52115656A (en) 1977-09-28

Family

ID=12351170

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3216076A Pending JPS52115656A (en) 1976-03-24 1976-03-24 Composite electronic microscope

Country Status (1)

Country Link
JP (1) JPS52115656A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4532917Y1 (en) * 1967-01-07 1970-12-15
JPS478843U (en) * 1971-02-26 1972-10-03

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4532917Y1 (en) * 1967-01-07 1970-12-15
JPS478843U (en) * 1971-02-26 1972-10-03

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