JPS52117547A - Electronic gun system - Google Patents

Electronic gun system

Info

Publication number
JPS52117547A
JPS52117547A JP3417876A JP3417876A JPS52117547A JP S52117547 A JPS52117547 A JP S52117547A JP 3417876 A JP3417876 A JP 3417876A JP 3417876 A JP3417876 A JP 3417876A JP S52117547 A JPS52117547 A JP S52117547A
Authority
JP
Japan
Prior art keywords
gun system
electronic gun
electronic beam
electronic
speed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3417876A
Other languages
Japanese (ja)
Inventor
Masahiko Washimi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP3417876A priority Critical patent/JPS52117547A/en
Publication of JPS52117547A publication Critical patent/JPS52117547A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)

Abstract

PURPOSE: To switch the current amount of electronic beam with the time speed of about blanking speed, the highest velocity among electronic beam exposure equipment.
COPYRIGHT: (C)1977,JPO&Japio
JP3417876A 1976-03-30 1976-03-30 Electronic gun system Pending JPS52117547A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3417876A JPS52117547A (en) 1976-03-30 1976-03-30 Electronic gun system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3417876A JPS52117547A (en) 1976-03-30 1976-03-30 Electronic gun system

Publications (1)

Publication Number Publication Date
JPS52117547A true JPS52117547A (en) 1977-10-03

Family

ID=12406943

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3417876A Pending JPS52117547A (en) 1976-03-30 1976-03-30 Electronic gun system

Country Status (1)

Country Link
JP (1) JPS52117547A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004038508A1 (en) * 2002-10-28 2004-05-06 Matsushita Electric Industrial Co., Ltd. Electron beam exposure method and electron beam exposure system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004038508A1 (en) * 2002-10-28 2004-05-06 Matsushita Electric Industrial Co., Ltd. Electron beam exposure method and electron beam exposure system
US7176471B2 (en) 2002-10-28 2007-02-13 Matsushita Electric Industrial Co., Ltd. Electron beam exposure method and electron beam exposure apparatus

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