JPS52117577A - Electron beam exposing unit - Google Patents

Electron beam exposing unit

Info

Publication number
JPS52117577A
JPS52117577A JP3418576A JP3418576A JPS52117577A JP S52117577 A JPS52117577 A JP S52117577A JP 3418576 A JP3418576 A JP 3418576A JP 3418576 A JP3418576 A JP 3418576A JP S52117577 A JPS52117577 A JP S52117577A
Authority
JP
Japan
Prior art keywords
electron beam
exposing unit
beam exposing
housing
constant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3418576A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5320392B2 (2
Inventor
Kohei Hori
Shuntaro Tai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP3418576A priority Critical patent/JPS52117577A/ja
Publication of JPS52117577A publication Critical patent/JPS52117577A/ja
Publication of JPS5320392B2 publication Critical patent/JPS5320392B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP3418576A 1976-03-30 1976-03-30 Electron beam exposing unit Granted JPS52117577A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3418576A JPS52117577A (en) 1976-03-30 1976-03-30 Electron beam exposing unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3418576A JPS52117577A (en) 1976-03-30 1976-03-30 Electron beam exposing unit

Publications (2)

Publication Number Publication Date
JPS52117577A true JPS52117577A (en) 1977-10-03
JPS5320392B2 JPS5320392B2 (2) 1978-06-26

Family

ID=12407129

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3418576A Granted JPS52117577A (en) 1976-03-30 1976-03-30 Electron beam exposing unit

Country Status (1)

Country Link
JP (1) JPS52117577A (2)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57147238A (en) * 1981-03-06 1982-09-11 Hitachi Ltd Electron ray drawing device
JP2008207882A (ja) * 2008-06-10 2008-09-11 Moenickheim Peter 水を主成分とする製品のための新規なパッケージング及びデリバリシステム

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57147238A (en) * 1981-03-06 1982-09-11 Hitachi Ltd Electron ray drawing device
JP2008207882A (ja) * 2008-06-10 2008-09-11 Moenickheim Peter 水を主成分とする製品のための新規なパッケージング及びデリバリシステム

Also Published As

Publication number Publication date
JPS5320392B2 (2) 1978-06-26

Similar Documents

Publication Publication Date Title
JPS52117577A (en) Electron beam exposing unit
JPS526252A (en) Collapsible-type stage device.
JPS52110279A (en) Device for making fresh water from sea water
JPS52156458A (en) Double piping
JPS546727A (en) Mark read-out circuit
JPS52120761A (en) Exposure unit
JPS52155416A (en) Oil supplying system
JPS51126190A (en) Optical measurement, calculation circuit
JPS5291880A (en) 3-acyl-5-fluorouracil
JPS5340237A (en) Associative memory unit
JPS5410689A (en) Semiconductor laser device and its production
JPS5335441A (en) Pattern permanent memory unit
JPS5285352A (en) Constant-voltage circuit
JPS52127718A (en) Character display unit
JPS5217641A (en) Heat-proofing processed power board
JPS5217639A (en) Heat-proofing processed power board
JPS5359953A (en) Refrigerant circulation device
JPS5212746A (en) Air conditioner
JPS51144932A (en) Heat-proof current distribution board
JPS5434172A (en) Electromagnetic-shielding dust-proof constant-temperature chamber
JPS5248257A (en) Agricutural air cooler
JPS5245037A (en) Protection circuit
JPS5218707A (en) Emulsion composition for chemical dustcloth
JPS5293715A (en) Bis-(1-methyl-2-vinyl-4,6-heptadienyl)carbonate
JPS537672A (en) 4-aminomethyl-5,6,7-trihydroxyisocoumarin